激光高分子聚合物纳米制造技术及应用进展(特邀)  

Advances in Laser Nanofabrication Technology of High-molecular Polymer and Its Application(Invited)

作　　者：张琛[1] 朱洁 章裕 王凯歌[1] 赵伟[1] 杨亚平 冯晓强[1] 陈浩伟[1] 白晋涛[1] ZHANG Chen;ZHU Jie;ZHANG Yu;WANG Kai-ge;ZHAO Wei;YANG Ya-ping;FENG Xiao-qiang;CHEN Hao-wei;BAI Jin-tao(State Key Laboratory of Western Energy Photon Technology and Functional Materials Jointly Built by Province and Ministry,National Center for International Research of Photoelectric Technology&Nano-functional Materials and Application,Key Laboratory of Photoelectron Technology of Shaanxi Province,Institute of Photonics and PhotonTechnology,Northwest University,Xi'an 710127,China)

机构地区：[1]西北大学光子学与光子技术研究所,西部能源光子技术与功能材料省部共建,国家重点实验室国家级光电技术与纳米功能材料国际联合研究中心,陕西省光电子技术重点实验室,西安710127

出　　处：《光子学报》2020年第11期126-143,共18页Acta Photonica Sinica

基　　金：国家重大科研仪器研制项目(No.51927804);国家自然科学基金(Nos.61378083,61405159,11504294);国家自然科学基金重大基础研究计划培育项目(No.91123030);陕西省科技创新团队项目(No.S2018-ZC-TD-0061);陕西省教育厅专项科研计划项目(No.18JK0791)。

摘　　要：激光高分子聚合物纳米制造技术是当前国际精密制造领域研究的热点技术.基于双光子、多光子非线性效应以及光激发-光抑制机制,激光制造技术打破了光学衍射极限的限制,能够实现纳米精度的三维立体复杂结构的无掩模快速制造,有力地为相关领域的纳米结构制造需求提供了解决方案.本文简单回顾了激光高分子聚合物纳米制造技术的发展历程,详细阐述了激光技术实现纳米精度制造的原理及其相应的技术特点,介绍了其在微纳光学、光信息存储、仿生材料、生物医学诊疗等多个领域的新发展及应用情况,展望了激光高分子聚合物纳米制造技术未来面临的主要挑战.Laser nano-fabrication technology of high-molecular polymer is an international research focus in the field of precision manufacturing.Based on the nonlinear effect of two-photon,multi-photon nonlinear effects and photoexcitation-photoinhibition mechanism,laser fabrication technology has broken the limits of optical diffraction,realizing a maskless rapid fabrication of three-dimensional complex nanostructures,which powerfully provides efficient solutions for the nanostructure fabrication demands in relevant fields.In this paper,the development history of laser high-molecular polymer nano-fabrication technology was briefly reviewed,and the principle of realizing nano-precision fabrication through laser and correspondingtechnology characteristics were described in details.Moreover,the new development and applications of laser nano-fabrication technology in the fields of micro-nano optics,optical information storage,biomimetic materials,biomedical diagnosis and treatment and so on were summarized.Eventually,challenges in laser nano-fabrication technology of high-molecular polymer and its future development were prospected.

关 键 词：激光制造技术 高分子聚合物 双/多光子直写 双束激光超分辨直写 光聚合 功能纳米材料 衍射极限 

分 类 号：TN249[电子电信—物理电子学]