基于非球面反射镜的高分辨KB显微成像系统设计  

Design of high resolution KB microscopy system based on aspherical mirror

作　　者：雷婧艺 徐捷[1] 陈亮[1] 徐欣业 李文杰[1] 穆宝忠[1] LEI Jingyi;XU Jie;CHEN Liang;XU Xinye;LI Wenjie;MU Baozhong(School of Physics Science and Engineering,Tongji University,Shanghai 200092,China)

机构地区：[1]同济大学物理科学与工程学院,上海200092

出　　处：《光学仪器》2020年第5期50-56,共7页Optical Instruments

基　　金：国家重点研发计划项目(YFA0403304)。

摘　　要：为了突破球面反射镜面形对传统Kirkpatrick-Baez(KB)显微镜空间分辨率的限制,建立了一种非球面KB显微成像系统的光学设计方法。利用椭圆柱面反射镜代替球面镜,通过几何关系计算出反射镜参数的数学表达式,结合主要光学结构参数对空间分辨率影响的定量分析,提出了一组适用我国现阶段强激光装置的非球面KB显微镜的结构参数,并在实验室内开展背光成像实验。实验结果表明,在中心视场,其空间分辨率优于2μm,在200μm的视场范围内,空间分辨率优于5μm,集光立体角可达1.3×10-6sr。非球面KB显微镜有效提高了KB显微镜中心视场分辨率,符合内爆靶减速阶段的高分辨诊断需求。In order to break the limitation of the spherical mirror's surface shape on the spatial resolution of the traditional Kirkpatrick-Baez(KB)microscope,an optical design method for the aspherical KB microscopy imaging system was established.Elliptical cylindrical mirrors were used instead of spherical mirrors,and the mathematical expressions of the mirror parameters were calculated through geometric relationships.Combining the quantitative analysis of the influence of main optical structure parameters on spatial resolution,a set of optical structure parameters of aspherical KB microscopes suitable for current high-power laser devices in China were proposed,and the imaging experiment was carried out in the lab.The experiment shows that in the central field of view,the spatial resolution is better than 2μm,and in the field of view of 200μm,the spatial resolution is better than 5μm,and the geometrical solid angle can reach 1.3×10−6 sr.Aspherical KB microscope effectively improves the resolution of the central field of view of the KB microscope,which meets the needs of high-resolution diagnosis during the deceleration stage of implosion targets.

关 键 词：激光惯性约束核聚变 X射线显微成像 KB显微镜 非球面反射镜 空间分辨率 

分 类 号：O434.1[机械工程—光学工程]