双螺线圈射频共振结构增强硅空位自旋传感灵敏度方法  

Methodology of improving sensitivity of silicon vacancyspin-based sensors based on double spiral coil RFresonance structure

作　　者：张文杰 刘郁松 郭浩[1] 韩星程 蔡安江[2,3] 李圣昆 赵鹏飞[1] 刘俊[1] Zhang Wen-Jie;Liu Yu-Song;Guo Hao;Han Xing-Cheng;Cai An-Jiang;Li Sheng-Kun;Zhao Peng-Fei;Liu Jun(Key Laboratory of Instrumentation Science and Dynamic Measurement,Ministry of Education,North University of China,Taiyuan 030051,China;School of Mechanical and Electrical Engineering,Xi’an University of Architecture and Technology,Xi’an 710311,China;Shaanxi Key Laboratory of Nanomaterials and Technology,Xi’an 710311,China)

机构地区：[1]中北大学,仪器科学与动态测试教育部重点实验室,太原030051 [2]西安建筑科技大学机电工程学院,西安710311 [3]陕西省纳米材料与技术重点实验室,西安710311

出　　处：《物理学报》2020年第23期132-138,共7页Acta Physica Sinica

基　　金：国家重点研发计划(批准号:2017YFB0503100);博士后创新人才支持计划(批准号:BX20180276);国家自然科学基金(批准号:51805493,51922009,51727808,51775522);中国博士后科学基金(批准号:2018M641684);山西省应用基础研究项目(批准号:201801D221202,201901D111011(ZD),201801D121164);山西省重点研发计划(批准号:201803D121067);重点实验室基金(批准号:6142001180410,6142001180409);山西省重点实验室(批准号:201905D121001);中北大学青年学术带头人(批准号:QX201901);山西省1331工程重点学科建设计划(1331Project)资助的课题.

摘　　要：针对硅空位自旋磁共振信号射频场非均匀展宽问题,提出并设计了一种双螺线圈射频共振结构,利用双螺线圈平行对称特性,构建射频场均匀区,非均匀性小于0.9%,相比单根直线性结构,均匀性提高了56.889倍.同时,利用射频信号近距离互感耦合共振特性,实现了射频场的增强,相比单线圈结构增强了1.587倍,等效的自旋传感灵敏度提高了4.833倍.实验中搭建基于SiC硅色心自旋磁共振效应的光探测磁共振传感测量系统,通过对比不同类型的射频天线,测试得到基于双螺线圈射频共振天线结构的硅空位色心自旋磁共振信号对比度提高了6倍,通过调制解调信息解算方法得到传感器的灵敏度提高了4.833倍,传感器噪声降低了8倍,提高了硅空位自旋传感测量灵敏度,结合SiC晶圆芯片制造技术,为高精度、芯片级自旋量子传感器件的制造提供了技术支撑.Due to the power instability and field non-uniformity of radio frequency(RF),microwave(MW)and laser signals,inhomogeneous broadening of spin magnetic resonance line causes the absorption to decrease in a nuclear resonance system,which can reduce the sensitivity of spin-based sensing and testing technology.In this paper,we propose and design a double solenoid coil RF resonance antenna structure.The nearly uniform RF field density is produced by the two solenoid coil antenna structures that are parallel to the symmetry axis.The size of the uniformity in the center region of double solenoid coil RF resonance antenna structure is aboutπ×375 mm2×10 mm.And the non-uniformity is less than 0.9%.Comparing with a single straight wire antenna and the single solenoid coil RF resonance antenna structure,the uniformity is improved by about 56.889 times and 42.889 times,respectively.At the same time,based on the near-field mutual inductance coupled resonance effect,the intensities of RF field in the center region of the two-solenoid coil antenna structure is enhanced.Comparing with the single solenoid coil antenna structures,it is enhanced by about 1.587 times.And the equivalent sensitivity of the silicon vacancy color center spin based sensor is enhanced by about 4.833 times.In the experiment,an optical detection magnetic resonance measurement system based on the spin magnetic resonance effect of silicon vacancy color center in single crystal SiC is built.Comparing with the single straight wire antenna and the single solenoid coil RF resonance antenna structure,the contrast of the silicon vacancy color center spin magnetic resonance signals of the double solenoid coil RF resonance antenna structure increases about 6 times and 2.4 times,respectively.The sensitivity of the spin-based sensor is increased by 4.833 times and 2.071 times through using the modulation and demodulation method,and the noise decreases by 8 times and twice.Hence,based on this double solenoid coil RF resonance antenna structure,the sensitivity of the si

关 键 词：硅空位色心 射频共振天线 均匀场 自旋传感 灵敏度 

分 类 号：TN820[电子电信—信息与通信工程]