压电陶瓷驱动系统的设计与研究  

Design and research of piezoelectric ceramics driving system

作　　者：陈姝雨[1] 王学亮 CHEN Shuyu;WANG Xueliang(Northeastern University,Shenyang 110819,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]东北大学,辽宁沈阳110819 [2]中国科学院大学,北京100049

出　　处：《现代电子技术》2020年第24期34-37,共4页Modern Electronics Technique

基　　金：国家自然科学基金面上项目(61973067)。

摘　　要：针对光刻机投影物镜中使用压电陶瓷对像质补偿镜组进行精密定位控制的需求,设计一种压电陶瓷驱动系统,并着重对其精度性能进行了分析与研究。首先对系统进行了误差项分解,然后对各误差项进行详细的理论计算,最后将所有误差项的影响按最差情况合成,所得结果满足设计要求。进而试制了系统样机,并对其性能进行实验验证,结果表明,压电陶瓷驱动系统的误差不超过80 mV,与理论分析的结果符合,满足压电陶瓷驱动系统的设计指标。In allusion to the requirement that the piezoelectric ceramics is used in the projection objective of lithography machine to execute precise positioning control of image quality compensating mirror group,a piezoelectric ceramics driving system is designed and its accuracy performance is analyzed emphatically.The error term is decomposed for the system,and then each error term is calculated theoretically in detail.The influence of all the error terms is synthesized according to worst case,and the obtained results meet the design requirements.A prototype of the system was trial⁃manufactured and its performance was verified by experiments.The results show that the error of the piezoelectric ceramics driving system is less than 80 mV,which is consistent with the theoretical analysis and meets the design indexes of the piezoelectric ceramics driving system.

关 键 词：压电陶瓷 驱动系统 系统设计 误差项分解 精度分析 实验验证 

分 类 号：TN876-34[电子电信—信息与通信工程]