平面线圈型时栅传感器及动尺姿态误差特性分析  

Analysis of Attitude Error Characteristics of Planar Coil Time Grating Sensor and Moving Ruler

作　　者：刘洋[1] 武亮[1] 彭东林[1] 钟自强 牟川 景欢 LIU Yang;WU Liang;PENG Dong-lin;ZHONG Zi-qiang;MOU Chuan;JING Huan(Engineering Research Center of Mechanical Testing Technology and Equipment,Ministry of Education,Chongqing University of Technology,Chongqing 400054,China)

机构地区：[1]重庆理工大学机械检测技术与装备教育部工程中心,重庆400054

出　　处：《仪表技术与传感器》2020年第11期21-27,32,共8页Instrument Technique and Sensor

摘　　要：根据时栅传感器测量原理,提出一种利用平面线圈代替齿槽绕线方式的直线时栅位移传感器以提高位移测量精度。该传感器通过定尺上的励磁线圈产生行波磁场,随着动尺移动,利用磁场拾取线圈感应不同位置处的磁场变化得到行波信号来实现精密位移测量。通过建模仿真,研究了动尺不同姿态下的误差特性并对其进行了谐波分析。得到了不同姿态对位移测量误差的影响规律。制作加工了传感器并展开了验证实验,仿真与实验结果均表明:不同的动尺姿态对位移测量误差的影响主要体现在1次、2次和4次谐波上,且俯仰引起误差变化最大,其余姿态下均较小。在定尺与动尺之间气隙厚度为0.2 mm时,其原始误差为81μm。通过误差修正与拟合可进一步提高测量精度。According to the measuring principle of time grating sensor,a linear time grating displacement sensor using planar coil instead of slot winding was proposed to improve the displacement measuring accuracy.The sensor generates traveling wave magnetic field through the excitation coil on the fixed scale.With the moving scale moving,the magnetic field pickup coil is used to induce magnetic field changes at different positions to obtain traveling wave signals to realize precise displacement measure⁃ment.Through modeling and simulation,the error characteristics of the moving ruler under different postures are studied and har⁃monic analysis is carried out.The influence rules of different postures on displacement measurement errors are obtained.Sensors are fabricated and verified.Simulation and experimental results show that the influence of different moving ruler postures on dis⁃placement measurement errors is mainly reflected in the 1st,2nd and 4th harmonics,and the errors caused by pitch are the largest while the other postures are smaller.The thickness of the air gap between the fixed ruler and the moving ruler is 0.2mm,and the o⁃riginal error is 81μm.The measurement accuracy can be further improved through error correction and fitting.

关 键 词：时栅传感器 误差特性分析 动尺姿态 

分 类 号：TH711[机械工程—测试计量技术及仪器]