基于位置敏感半导体光电器件的同步辐射光斑位置检测  

The detection of synchronous radiation beam position based on position-sensitive semiconductor optoelectronic devices

作　　者：孟楠 曾建荣[1,2] 李中亮 边风刚 MENG Nan;ZENG Jianrong;LI Zhongliang;BIAN Fenggang(Shanghai Institute of Applied Physics,Chinese Academy of Sciences,Shanghai 201800,China;Shanghai Advanced Research Institute,Chinese Academy of Sciences,Shanghai 201204,China;University of Chinese Academy of Sciences,Beijing 100049,China)

机构地区：[1]中国科学院上海应用物理研究所,上海201800 [2]中国科学院上海高等研究院,上海201204 [3]中国科学院大学,北京100049

出　　处：《核技术》2020年第12期16-24,共9页Nuclear Techniques

基　　金：科技部国家重点研发项目(No.2018YFB0704201);国家自然科学基金(No.U1732123、No.11875192)资助。

摘　　要：同步辐射的光斑位置及强度的稳定性对实验尤为重要,光束稳定性的定量评测是目前光束线站实验中需要解决的一个关键问题。二维Pin-cushion型光电位置灵敏探测器(Position Sensitive Detector,PSD)可同时检测两个方向的光斑位置变化和光斑尺寸,且便于安装和使用。对于5.9 mm×2.0 mm的矩形光斑开展实验研究,获得探测器中心位置水平和垂直方向的分辨率分别达到1.5μm和1.4μm。利用该探测器的输出电流值,可同时监测光通量的变化,信噪比RSN可达4.3×10^6。该微型探测器能有效满足光束线站光斑位置、光斑尺寸和光通量的监测需求。[Background]In the synchrotron radiation experiment,the position of the beam and the stability of the flux seriously affect the result of experiment.Quantitative evaluation of beam stability is one of key problems in the experiment.It is essential to develop the accurate beam position measurement solution that meets the experimental requirements of the X-ray beams.[Purpose]This study aims to detect beam position for synchrotron radiation X-ray experiments by using position sensitive semiconductor detector(PSD)miniature detector.[Methods]Pin-cushion PSD produced by Hamamatsu company of Japan was adopted for experimental test,and a rectangular beam spot of 5.9 mm×2.0 mm was taken for measurement on BL09B1 beamline of SSRF.When the X-ray beam come into the detector's sensitive region,a current was generated due to photoelectric effect collected by the four electrodes.The location of the incident X-ray beam was determined according to the value of the current given by the galvanometer.In addition,the change of the beam flux was monitored through the total current simultaneously.[Results]Experiment data show that PSD-based miniature detector can meet the needs of synchrotron radiation experiment.For a rectangular spot with a size of 5.9 mm×2.0 mm,the minimum resolution in X and Y direction are 1.5μm and 1.4μm,respectively.The signal/noise ratio of PSD detector for beam flux monitoring is more than 4.3×10^6.[Conclusions]The PSD-based miniature detector can effectively meet the monitoring requirements of spot position,spot size and luminous flux.

关 键 词：光电位置传感器 光斑位置 同步辐射 二维探测 

分 类 号：TL99[核科学技术—核技术及应用]