二维光栅位移测量技术综述  

Overview of 2D grating displacement measurement technology

作　　者：尹云飞 刘兆武[1] 吉日嘎兰图[1] 于宏柱[1] 王玮[1] 李晓天[1] 鲍赫[1] 李文昊[1] 郝群[3] YIN Yun-Fei;LIU Zhao-Wu;JIRIGALANTU;YU Hong-Zhu;WANG Wei;LI Xiao-Tian;BAO He;LI Wen-Hao;HAO Qun(Changchun Institute of Optics,Fine Mechanics and Physics,Chinese Academy of Sciences,Changchun 130033,China;University of Chinese Academy of Sciences,Beijing 100049,China;School of Optoelectronics,Beijing Institute of Technology,Beijing 100081,China)

机构地区：[1]中国科学院长春光学精密机械与物理研究所,吉林长春130033 [2]中国科学院大学,北京100049 [3]北京理工大学光电学院,北京100081

出　　处：《中国光学》2020年第6期1224-1238,共15页Chinese Optics

基　　金：国家重点研发计划项目(No.2016YFB0500100);吉林省科技发展计划(No.20190201021JC,No.20190103158JH,No.20190103157JH,No.20190302047GX);广东省重点领域研发计划项目(No.2019B010144001);国家自然科学基金(No.61975255);民用航天预研项目(No.D040101)。

摘　　要：超精密位移测量技术不仅是精密机械加工的基础,在以摩尔定律飞速发展的芯片制造行业中也起到决定性的作用。以光栅栅距为测量基准的光栅位移测量系统被广泛应用于多维测量系统,光栅位移测量系统与激光位移测量系统相比,大大降低了对使用环境的湿度、温度和气压的要求。本文主要介绍了近年来国内外基于二维光栅的位移传感系统光学结构的发展现状,从零差式和外差式光栅干涉测量原理入手,综述了基于单块二维光栅的光学结构到多块二维光栅耦合设计的光学结构发展历程,对比分析了几种二维光栅位移测量系统的优缺点,并展望了二维光栅位移测量系统发展趋势,总结了二维光栅位移测量系统的工程化进程。Ultra-precision displacement measurement technology is not only the basis of precision machining,but also plays a decisive role in the chip manufacturing industry that is rapidly developing in Moore's Law.The grating displacement measurement system based on the grating pitch is widely used in multidimensional measurement system.Compared with the laser displacement measurement system,grating displacement measurement system greatly reduces the environmental requirements for humidity,temperature and pressure.In this paper,the development status of the optical structure of displacement sensing system based on two-dimensional grating in recent years is introduced.The principles of zero-difference and heterodyne grating interferometrys are introduced.The optical structure based on single-block two-dimensional grating is reviewed.The development history of the optical structure in single-block two-dimensional grating to coupling designs of multi-block two-dimensional gratings is summarized,the advantages and disadvantages of several two-dimensional grating displacement measurement systems are compared and analyzed,and the development trend of two-dimensional grating displacement measurement system is prospected.The engineering process of two-dimensional grating displacement measurement system is summarized.

关 键 词：二维光栅 光栅干涉技术 精密位移测量 

分 类 号：TP394.1[自动化与计算机技术—计算机应用技术] TH691.9[自动化与计算机技术—计算机科学与技术]