Offner分光成像系统的球面自准直法快速装调  

Fast alignment of an offner imaging spectrometer using a spherical autostigmatic method

作　　者：杨拓拓 陈新华 赵知诚[1,2,3] 朱嘉诚 沈为民[1,2,3] YANG Tuo-tuo;CHEN Xin-hua;ZHAO Zhi-cheng;ZHU Jia-cheng;SHEN Wei-min(School of Optoelectronic Science and Engineering,Soochow University,Suzhou 215006,China;Key Laboratory of Modern Optical Technologies of Education Ministry of China,Suzhou 215006,China;Key Laboratory of Advanced Optical Manufacturing Technologies of Jiangsu Province,Suzhou 215006,China)

机构地区：[1]苏州大学光电科学与工程学院,江苏苏州215006 [2]教育部现代光学技术重点实验室,江苏苏州215006 [3]江苏省先进光学制造技术重点实验室,江苏苏州215006

出　　处：《中国光学》2020年第6期1324-1331,共8页Chinese Optics

基　　金：国家重点研发计划(No.2016YFB0500501-2)。

摘　　要：Offner分光成像系统由凸面光栅和两个凹面反射镜组成。光学结构上同心的特点使其具有相对孔径大、畸变小、结构紧凑等优点。为了降低Offner分光成像系统的装调难度,提高装调效率,本文基于同心特点和球面自准直原理,研究了Offner分光成像系统的快速装调方法。首先搭建球面自准直装置,当该装置生成的点光源位于球面反射镜曲率中心处时,其反射像点和点光源重合。通过检测反射像点和点光源之间的位置偏差,可判定球面反射镜曲率中心位置的偏离程度。利用该装置定位主镜、凸面光栅和三镜的曲率中心位置,完成Offner分光成像系统的装调。实验结果表明,两块离轴凹面反射镜的曲率中心间距误差可控制在10μm以内,装调完成的分光成像系统成像性能较好,满足指标要求。与现有装调方法相比,该方法具有易于对准、装调速度快、所需设备成本低等优点。Offner imaging spectrometers consist of a convex grating and two concave mirrors.The concentric characteristics of the optical structure allow it to have a large relative aperture,small distortion and a compact structure.In order to reduce the difficulty of aligning an Offner imaging spectrometer and improve its efficiency,this paper presents a fast alignment method for Offner imaging spectrometers based on the concentric characteristic and spherical autostigmatic method.Firstly,a spherical autostigmatic device is built,which can generate a point source.When the point source is located at the spherical mirror’s center of curvature(CoC),its reflection image point and the point source coincide.By measuring the distance between the reflection image point and the point source,the positional deviation of the spherical mirror’s CoC can be determined.The Offner imaging spectrometer is completed by locating the CoC of its primary mirror,convex grating and tertiary mirror.The results show that the location error of the two off-axis concave mirrors’CoC can be controlled within 10μm,and our imaging performance requirements for the imaging spectral system are satisfied.Compared with pre-existing methods,this method is easier to operate,lower in cost and has faster alignment capabilities.

关 键 词：Offner分光成像系统 同心特性 球面自准直 快速装调 

分 类 号：TH744[机械工程—光学工程]