强光光学元件加工技术发展  

Development of High-light Optical Element Processing Technology

作　　者：戴一帆[1,2,3] 钟曜宇 石峰 田野[1,2,3] DAI Yifan;ZHONG Yaoyu;SHI Feng;TIAN Ye(College of Intelligence Science,National University of Defense Technology,Changsha,410073;Ultra-precision Engineering Key Laboratory of Hunan Province,Changsha,410073;Laboratory of Science and Technology on Integrated Logistics Support,National University of Defense Technology,Changsha,410073)

机构地区：[1]国防科技大学智能科学学院,长沙410073 [2]超精密加工技术湖南省重点实验室,长沙410073 [3]国防科技大学装备综合保障技术重点实验室,长沙410073

出　　处：《中国机械工程》2020年第23期2788-2797,共10页China Mechanical Engineering

基　　金：国家自然科学基金资助项目(51991374,51835013)。

摘　　要：面向强光光学元件的低损伤制造,概述了关联激光损伤性能的损伤前驱体检测表征方法,提出纳米尺度污染与化学结构缺陷等损伤前驱体是低损伤加工过程需要关注的焦点;结合光学元件加工方法的发展进程,探讨了基于化学辅助磁流变抛光和离子束溅射清洗技术的纳米损伤前驱体的抑制方法,以有效减少纳米级污染和化学结构缺陷;提出强光光学元件制造面临的三个挑战,为实现强光光学元件清洁制造提供参考。In order to realize low-defect fabrication of optical elements,detection and characterization methods of damage precursors related to laser damage performance were summarized herein.It was proposed that nanoscale damage precursors and chemical structural defects were the focus in low damage fabrication.Combined with the development of optical elements,methods for mitigating nanoscale damage precursor were discussed to effectively decrease nanoscale contaminations and chemical structural defects based on chemical-assisted magnetorheological polishing and ion beam sputtering cleaning technology.Three challenges in low-defect fabrication of optical elements in high fluence were introduced,which might be a reference for the clean manufacturing of optical elements.

关 键 词：光学元件 辐照损伤 抛光 溅射清洗 

分 类 号：TH161[机械工程—机械制造及自动化]