高精度空气折射率测量系统设计与实现  

Design and Implementation of High Precision Air Refractive Index Measurement System

作　　者：闵帅博 严利平[1] 崔建军[2] 王冬 束红林 陈恺 MIN Shuai-bo;YAN Li-ping;CUI Jian-jun;WANG Dong;SHU Hong-lin;CHEN Kai(Laboratory of Nanometer Measurement Technology,Zhejiang Sci-Tech University,Hangzhou,Zhejiang 310018,China;National Institute of Metrology,Beijing 100029,China;Academy of Precision Instruments and Photoelectronics Engineering,Tianjin University,Tianjin 300072,China;School of Mechanical and Power,Henan Polytechnic University,Jiaozuo,Henan 454000,China)

机构地区：[1]浙江理工大学纳米测量技术实验室,浙江杭州310018 [2]中国计量科学研究院,北京100029 [3]天津大学精密仪器与光电子工程学院,天津300072 [4]河南理工大学机械与动力工程学院,河南焦作454000

出　　处：《计量学报》2020年第11期1332-1338,共7页Acta Metrologica Sinica

基　　金：国家自然科学基金(51675497);国家重点研发计划专项(2017YFF0206305);北京市自然科学基金(3162034)。

摘　　要：针对商用空气折射率测量装置受到传感器采集性能和解算公式准确度的影响使得实际测量精度较低的问题,基于便携式多环境参数采集装置,设计了一套空气折射率测量系统,采集环境中的温湿度、大气压强状态信息,对3种折射率间接测量公式进行误差分析,并和商用环境补偿器进行性能对比。实验结果表明:在压强为100.17~100.21 kPa,温度为21.1~21.9℃,湿度为45.9~58.0%RH的实验条件下,该测量系统的测量偏差比商用环境补偿器低2.69×10^-7。Aiming at commercial air refractive index measuring device is affected by the acquisition performance of sensor and the accuracy of calculation formula,and its actual measurement accuracy is low.Based on portable multienvironmental parameter acquisition device,a set of air refractive index measurement system is designed to collect the information of temperature,humidity and atmospheric pressure in the environment.Error analysis of three indirect refractive index measurement formulas is carried out,and performance comparison with commercial environmental compensator is made.The experimental results show that under the experimental conditions of pressure 100.17~100.21 kPa,temperature 21.1~21.9℃and humidity 45.9~58.0%RH,the measurement error of the system is 2.69×10^-7 lower than that of the commercial environmental compensator.

关 键 词：计量学 空气折射率 多环境参数 便携式采集装置 环境补偿器 测量系统 实时分析 

分 类 号：TB96[机械工程—光学工程]