单晶悬臂梁式压电振子的尺寸优化与研究  

Size Optimization and Research of Unimorph Cantilever of Piezoelectric Oscillator

作　　者：王乐生 王海峰[1] 王世龙 李海宁 WANG Lesheng;WANG Haifeng;WANG Shilong;LI Haining(School of Electromechanic Engineering,Qingdao University,Qingdao 266071,China)

机构地区：[1]青岛大学机电工程学院,山东青岛266071

出　　处：《青岛大学学报（工程技术版）》2020年第4期1-5,16,共6页Journal of Qingdao University(Engineering & Technology Edition)

基　　金：国家自然科学基金资助项目(51405255);山东省高等学校科技计划项目(J12LN95);山东省科技发展计划-政策引导类项目(2012YD04038)。

摘　　要：为研究悬臂梁式压电振子的发电能力与自身结构尺寸的关系,本文将3种不同形状的基板(矩形、梯形、三角形)与3种不同形状的压电片(矩形、梯形、三角形)排列组合成6种不同形式的单晶悬臂梁式压电振子,并建立6种不同形式的压电悬臂梁有限元模型,利用ANSYS有限元分析软件,对压电片尺寸、基板尺寸和压电片位置进行仿真分析。仿真结果表明,矩形基板、梯形基板和三角形基板的悬臂梁,其压电片与基板的最佳长度比分别为0.15,0.25和0.35,其最佳厚度比分别为0.75,0.75~1和1;压电片为三角形悬臂梁的电压输出与压电片的厚度成正比,而压电片为其它形状的悬臂梁,随着压电片厚度的增加,其电压输出先增后减;压电悬臂梁的电压输出与压电片的宽度、基板的宽度和厚度以及压电片到基板固定端的距离成反比,与基板的长度成正比。该研究为相关领域的科研人员提供了理论支撑。In order to study the relationship between the power generation capacity of the cantilever beam piezoelectric Oscillator and it′s structuralsize,this paper arranges three different shapes of substrate(rectangle,trapezoid,triangle)and three different shapes of piezoelectric sheets(rectangle,trapezoid,triangle),and combines into six different forms of unimorph cantilever beam piezoelectric Oscillator,and establishes 6 different forms of piezoelectric cantilever beam finite element models.It uses ANSYS finite element analysis software to determine the size of the piezoelectric sheet,the size of the substrate and the position of the piezoelectric sheet Perform simulation analysis.The simulation results show that for the cantilever beams of rectangular,trapezoidal,and triangular substrates,the best length ratios of the piezoelectric sheet to the substrate are 0.15,0.25 and 0.35,and the best thickness ratios are 0.75,0.75~1 and 1 respectively;The voltage output of the piezoelectric sheet which is a triangular cantilever beam is proportional to the thickness of the piezoelectric sheet while the piezoelectric sheet is a cantilever beam of other shapes.As the thickness of the piezoelectric sheet increases,the voltage output first increases and then decreases;The voltage output of the piezoelectric cantilever beam is inversely proportional to the width of the piezoelectric sheet,the width and thickness of the substrate,and the distance from the piezoelectric sheet to the fixed end of the substrate,and is directly proportional to the length of the substrate.This research provides theoretical support for researchers in related fields.

关 键 词：单晶压电振子 变截面悬臂梁 静力学分析 尺寸优化 压电俘能 ANSYS 

分 类 号：TN384[电子电信—物理电子学]