CT球管阳极靶盘循环加热除气装置研制  

Development of Circulating Heating Degassing Device for CT Tube Anode Target

作　　者：边悦 邱添 蕫银杏 Bian Yue;Qiu Tian;Dong Yinxing(Beijing NAURA Vacuum Technology Co.Ltd,Beijing 100015,China)

机构地区：[1]北京北方华创真空技术有限公司,北京100015

出　　处：《真空科学与技术学报》2020年第11期1085-1089,共5页Chinese Journal of Vacuum Science and Technology

摘　　要：针对CT球管阳极靶盘生产企业现有靶盘加热除气设备效率低下的问题,北方华创真空技术有限公司设计了CT球管阳极靶盘循环加热除气装置。该装置配有四个相同的石英钟罩工位,各工位共享一套分子泵高真空系统,并且改进了装载工具的结构以增加单个工位中的工件数量。根据用户脱气工艺曲线的加热和冷却时间的特点,选择使用PLC驱动伺服电机来精确控制中频线圈的运动,以便中频线圈可以周期性地循环加热不同位置的工件,从而形成了紧凑的生产节拍,大大提高了生产效率,目前已获得了行业用户的广泛认可。Aiming at the low efficiency of the existing target heating and degassing equipment of CT tube anode target manufacturers,NAURA has designed a CT tube anode target disk circulating heating and degassing device.The device is equipped with four identical quartz bell jar stations,each station sharing a set of molecular pump high vacuum system,and the structure of the loading tool is improved to increase the number of workpieces in a single station.According to the characteristics of the heating and cooling time of the user’s degassing process curve,choose to use the PLC drive servo motor to precisely control the movement of the intermediate frequency coil,so that the intermediate frequency coil can periodically heat the different positions workpiece,thus forming a compact production cycle,and It has greatly improved production efficiency and has been widely recognized by industry users.

关 键 词：CT球管 阳极靶盘 高真空系统 中频线圈 循环加热 PLC 伺服电机 

分 类 号：TG155.2+1[金属学及工艺—热处理] TB79[金属学及工艺—金属学]