基于代理模型的MEMS结构可靠性仿真程序框架  

Reliability simulation program frame of MENS structure based on delegation model

作　　者：韩英[1] 李娟[2] HAN Ying;LI Juan(Jinzhong Vocational&Technical College,Jinzhong 030600,China;Ordnance Science Institute of China,Beijing 100089,China)

机构地区：[1]晋中职业技术学院,山西晋中030600 [2]中国兵器科学研究院,北京100089

出　　处：《兵器材料科学与工程》2020年第6期117-124,共8页Ordnance Material Science and Engineering

基　　金：国家国防科工局资助项目(Z092014B001)。

摘　　要：为准确评估结构尺寸、材料参数等对MEMS结构应力、应变等响应的影响,提出一种基于代理模型的MEMS结构可靠性仿真方法及程序框架。用图形化仿真工作流进行随机变量定义、有限元仿真分析程序集成、结果获取和功能函数定义,以ANSYS为例集成有限元分析程序进行结构可靠性仿真;用代理模型方法建立结构响应关于输入变量的近似模型,用设计方法尽可能减少仿真次数获得输入变量与输出变量的样本数据;基于代理模型和一次结构可靠度方法进行MEMS结构可靠度和灵敏度计算。结果表明:这种基于代理模型的MEMS结构可靠性仿真方法及程序框架可行、高效。In order to more accurately evaluate the effect of structural size,material parameters and other input uncertainties on the stress or strain response of MEMS(micro-electro-mechanical system)structure,an efficient reliability simulation framework based on finite element calculation was proposed.A graphical simulation workflow was used for structural problem definition,which includes random variables determination,finite element software package integration,simulation results extraction and performance function definition.Taking ANSYS as an example,details about the participation of finite element tool in the response function or performance function evaluation were discussed.Delegation model techniques were utilized to approximate the response function,whose input and response samples were constructed through the design of experiments(DOE)with minimal finite element simulation trials.The efficient structural reliability methods such as first order reliability method were applied to the probability and sensitivity calculations based on the approximate function.The results show that the method and program framework based on delegation model are feasible and efficient.

关 键 词：可靠性分析 MEMS可靠性 有限元 灵敏度 

分 类 号：TB114.3[理学—概率论与数理统计]