高量程加速度传感器的结构优化与仿真分析  

Structure optimization and simulation analysis of high-rangeacceleration sensor

作　　者：韩文曼 郭涛 HAN Wenman;GUO Tao(Micron Nanotechnology Research Center of North University of China,Taiyuan 030051,China)

机构地区：[1]中北大学微米纳米技术研究中心,山西太原030051

出　　处：《传感器与微系统》2021年第1期20-22,共3页Transducer and Microsystem Technologies

基　　金：2018年度国防科技重点实验室基金资助项目(JZX7Y201901SY005410)。

摘　　要：在传统双边四梁结构的基础上,优化设计了一种高量程加速度传感器结构,量程为10000 g n。理论上对其进行了应力分析,验证了结构的合理性,并通过有限元建模对传感器进行了静态结构分析,模态分析和抗过载能力分析。在恒压源供电条件下,传感器的固有频率大于50 kHz,灵敏度理论值为18.88μV/g n,抗过载能力为20000 g n。与传统结构相比,极大地提高了高量程加速度传感器的性能。On the basis of traditional double-sided four-beam structure,a high-range acceleration sensor structure is optimized and designed,with measuring range of 10000 g n.Theoretical analysis of the stress is performed to verify the rationality of the structure,and static structural analysis,modal analysis,and anti-overload capability analysis of the sensor are performed through finite element modeling.Under the condition of constant voltage source power supply,the natural frequency of the sensor is greater than 50 kHz,the theoretical sensitivity value is 18.88μV/g n,and the anti-overload capability is 20000 g n.Compared with the traditional structure,it greatly improves the performance of high-range acceleration sensors.

关 键 词：加速度传感器 高量程 有限元分析 固有频率 灵敏度 抗过载能力 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]