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出 处:《IMP & HIRFL Annual Report》2017年第1期90-93,共4页中国科学院近代物理研究所和兰州重离子研究装置年报(英文版)
摘 要:In our experiments,we used congruent samples of 1 mm thickness,single crystal LiTaO_(3).The samples were implanted at room temperature(RT)by 3.25 MeV Fe,6 MeV Xe,1 MeV Bi ions respectively,with projected ion ranges of 1.36,1.23,0.12m calculated by SRIM2008.Note that inert ion Xe is chosen for eliminating the potential effects of new phases resulting from chemical process during implantation,compared to metal ion Fe and Bi.The ion fluences were varied between 1×10^(12) and 2×10^(15) cm^(−2).The optical transmission spectra of the implanted samples were measured by PerkinElmer Lambda 900 UV/VIS/NIR Spectrometer with a scanning step length of 1 nm.During measurement,the incidence non-polarized light was perpendicular to the surfaces of the samples.The surface morphology of samples was characterized by OM and AFM.Rutherford backscattering-channeling(RBS-c)and XRD were used to examine ion-induced structural changes in samples.
关 键 词:LITAO3 IMPLANTATION CRYSTAL
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