螺旋电极压电扭转驱动器的设计与有限元分析  

Design and Finite Element Analysis of Piezoelectric Torsional Actuator withSpiral Electrode

作　　者：郭全圆 刘永刚[1,2] 曾奥柯 闫鹏飞 GUO Quanyuan;LIU Yonggang;ZENG Aoke;YAN Pengfei(School of Mechatronics Engineering,Henan University of Science and Technology,Luoyang 471003,China;Collaborative Innovation Center of Machinery Equipment Advanced Manufacturing of Henan Province,Henan University of Science and Technology,Luoyang 471003,China)

机构地区：[1]河南科技大学机电工程学院,河南洛阳471003 [2]河南科技大学机械装备先进制造河南省协同创新中心,河南洛阳471003

出　　处：《压电与声光》2020年第6期825-830,共6页Piezoelectrics & Acoustooptics

基　　金：国家自然科学基金资助项目(50975075);河南省基础与前沿技术研究计划重大基金资助项目(152300410083);河南省产学研合作基金资助项目(182107000012)。

摘　　要：该文设计了一种新型叉指型电极(IDE)结构形式的螺旋电极压电扭转驱动器,推导并建立了螺旋电极平面有效电极区域内点的应变理论方程。利用ABAQUS对该理论方程进行验证,并着重研究了电压、径向尺寸、圆盘厚度对该压电驱动器应变的影响。结果表明,螺旋电极压电扭转驱动器能够产生较大的切向应变和径向应变输出;增大电压,减小压电圆盘径向尺寸和压电圆盘厚度,有利于提高驱动器的驱动性能;在螺旋角、压电圆盘径向尺寸和电压一定时,螺旋电极压电扭转驱动器的切向应变达到普通电极型的17.5倍,径向应变是普通电极型的1.6倍。A new piezoelectric torsional actuator with the structure of spiral electrode based on the interdigital electrode(IDE)was designed,and the theoretical equation of strain for points in the effective electrode region of spiral electrode plane is derived and established.The theoretical equation was verified through the analysis software ABAQUS,and the influences of voltage,radial dimension and disk thickness on the strain of the piezoelectric actuator were studied.The results show that the piezoelectric torsional actuator with spiral electrode can produce large tangential strain and radial strain output,increasing the voltage and reducing the radial size and thickness of the piezoelectric disc are beneficial to improve the driving performance of the actuator.The tangential strain of the piezoelectric torsional actuator with spiral electrode can reach 17.5 times and the radial strain is 1.6 times that of the common electrode when the spiral angle,the radial size of the piezoelectric disc and the voltage are fixed.

关 键 词：螺旋电极压电扭转驱动器 螺旋电极 切向应变 径向应变 螺旋角 

分 类 号：TN384[电子电信—物理电子学] TM22[一般工业技术—材料科学与工程]