集成铌酸锂光子器件技术的研究进展  

Current Progress of Integrated Lithium Niobate Photonic Device Technology

作　　者：张涛[1] 何杰[1] 胡少勤[1] 许昕[1] 张玉蕾 ZHANG Tao;HE Jie;HU Shaoqin;XU Xin;ZHANG Yulei(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China;The 44th Institute of China Electronics Technology Group Corporation, Chongqing 400060, China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]中国电子科技集团公司第四十四研究所,重庆400060

出　　处：《压电与声光》2020年第6期837-842,共6页Piezoelectrics & Acoustooptics

摘　　要：铌酸锂单晶薄膜(LNOI)具有透光光谱宽,折射率高,二阶非线性高及压电响应大等优点,是一种重要的集成光子学基础材料。LNOI材料具有亚波长尺度的光约束和光电器件的高密度集成能力,能够实现具有更高性能、更低成本的全新器件及应用,给光通信和微波光子学带来革命性的变革。该文重点综述了LNOI的制备技术、LNOI电光调制器、LNOI声光调制器和LNOI电光频率梳的最新研究进展,简要讨论了铌酸锂光子器件在制作工艺和系统实现中面临的挑战。Lithium niobate(LiNbO3)on insulator(LNOI)is a promising material for integrated photonics,owing to its unique properties of wide optical transparency window,high refractive index,large second order nonlinearity and large piezoelectric response.The integrated LN material,featuring sub-wavelength scale light confinement and high integration of optoelectronic components,has the potential to enable higher performance,lower cost and entirely new devices and applications,and revolutionize optical communication and microwave photonics.This review focusses on the current progress of LNOI electro-optic modulator,LNOI acousto-optic(AO)modulator and LNOI electro-optic frequency comb,and briefly discusses the challenges meeting from fabrication and system realization.

关 键 词：绝缘体上铌酸锂 集成光子器件 铌酸锂单晶薄膜(LNOI)电光调制器 铌酸锂单晶薄膜(LNOI)声光调制器 铌酸锂单晶薄膜(LNOI)光学频率梳 

分 类 号：TM282[一般工业技术—材料科学与工程] TN2[电气工程—电工理论与新技术]