宽带高阈值低色散镜的性能研究  

Performance of Broadband Low Dispersion Mirrors with High Damage Threshold

作　　者：张宇晖 王胭脂[1,3,4] 陈瑞溢 王志皓 赵娇玲 李大伟[1,3,4] 赵元安[1,3,4] 朱美萍[1,3,4] 易葵[1,3,4] 晋云霞[1,3,4] 贺洪波 冷雨欣[4,5] 邵建达[1,3,4] Yuhui Zhang;Yanzhi Wang;Ruiyi Chen;Zhihao Wang;Jiaoling Zhao;Dawei Li;Yuanan Zhao;Meiping Zhu;Kui Yi;Yunxia Jin;Hongbo He;Yuxin Leng;Jianda Shao(Thin Film Optics Laboratory,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;Center of Materials Science and Optoelectronics Engineering,University of Chinese Academy of Sciences,Beijing 100049,China;Key Laboratory of High Power Laser Materials,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China;CAS Center for Excellence in Ultra-Intense Laser Science,Chinese Academy of Sciences,Shanghai 201800,China;State Key Laboratory of High Field Laser Physics,Shanghai Institute of Optics and Fine Mechanics,Chinese Academy of Sciences,Shanghai 201800,China)

机构地区：[1]中国科学院,上海光学精密机械研究所薄膜光学实验室,上海201800 [2]中国科学院大学材料与光电研究中心,北京100049 [3]中国科学院.上海光学精密机械研究所强激光材料重点实验室,上海201800 [4]中国科学院超强激光科学卓越创新中心,上海201800 [5]中国科学院上海光学精密机械研究所强场激光物理国家重点实验室,上海201800

出　　处：《中国激光》2020年第11期94-99,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(11904376);中意政府间合作项目(2018YFE0118000);国家自然科学基金委员会与中国工程物理研究院联合基金(U1630140);中国科学院青年创新促进会基金(2017289);中国科学院战略性先导科技专项(B类)(XDB1603)

摘　　要：宽带高损伤阈值低色散镜是拍瓦激光系统中不可或缺的光学元件。系统性地研究了金属-介质镜、介质镜和组合介质镜的光学性能、色散特性、抗损伤特性以及损伤机理。介质膜能够提高金属膜的损伤阈值,银-介质低色散镜的传输效率和损伤阈值比Au、Al更高;在飞秒激光作用下,金属-介质镜在近损伤阈值处为典型的鼓包形貌,这是由于金属层吸收了大量能量而产生了热应力破坏。在组合介质镜中,保护层HfO2的存在降低了Ta2O5中的电场,初始损伤层被转移至HfO2中,且在不牺牲反射带宽和色散性能的前提下介质膜的损伤阈值得到了提升。Low dispersion mirrors with broad bandwidth and high damage threshold are indispensable optical components in a petawatt(PW)laser system.Here,we systematically investigate the optical properties,dispersion characteristics,damage resistance characteristics and damage mechanisms of metal-dielectric mirrors,dielectric mirrors and ternary composite mirrors.The dielectric films can improve the damage thresholds of metal films.The transmission efficiency and damage threshold of silver-dielectric mirrors are higher than those of Au and Al.The typical damage morphology of near threshold metal-dielectric mirrors under the action of femtosecond lasers is bulge,and the reason is that the metal layer absorbs a lot of energy and causes the thermal stress damage.In ternary composite mirrors,the existence of the protective HfO2 layers makes the electric field in Ta2O5 decrease,the initial damage layer is transferred to HfO2,and the threshold increases without sacrificing reflection bandwidth and dispersion performance.

关 键 词：薄膜 低色散镜 反射膜 损伤阈值 拍瓦激光系统 

分 类 号：O436[机械工程—光学工程]