位置敏感探测器对激光追踪测量系统的影响  

Effects of Position Sensitive Detector on Laser Tracing Measurement System

作　　者：陈洪芳[1] 汤亮 张爽 孙若水 孙衍强[1] Hongfang Chen;Liang Tang;Shuang Zhang;Ruoshui Sun;Yanqiang Sun(Beijing Engineering Research Center of Precision Measurement Technology and Instruments,Beijing University of Technology,Beijing 100124,China)

机构地区：[1]北京工业大学北京市精密测控技术与仪器工程技术研究中心,北京100124

出　　处：《中国激光》2020年第11期100-109,共10页Chinese Journal of Lasers

基　　金：国家重点研发计划(2018YFB2001400);北京市自然科学基金(3182005)

摘　　要：提出了一种分析位置敏感探测器(PSD)对激光追踪测量系统性能影响的方法,分析了PSD的测量原理,建立了激光追踪测量系统中的PSD测量模型。利用Matlab/Simulink软件搭建了激光追踪测量系统的仿真模型,仿真分析了PSD的位移电压转换系数对激光追踪测量系统性能的影响。仿真结果表明,当位移电压转换系数αp为1000 m/V时,PSD的响应时间较短,激光追踪测量系统动态响应的超调量低、稳定时间短、动态超调误差小。实验结果表明,αp越大,PSD光电转换电路输出的电压误差越大,对激光追踪测量系统性能的影响也越大。当αp=1000 m/V时,PSD光电转换电路输出电压的误差最低,稳定时间最短。In the study,a method to analyze the effect of position sensitive detector(PSD)on the performance of laser tracing measurement system is proposed.The PSD measurement principle is analyzed,and the PSD measurement model is established in the laser tracing measurement system.A simulation model of the laser tracking measurement system is built using Matlab/Simulink software,and the influence of the displacement voltage conversion coefficient of PSD on the performance of the laser tracing measurement system is simulated and analyzed.Simulation results show that when the displacement voltage conversion coefficientαp is 1000 m/V,the response time of PSD is short,the overshoot of the dynamic response of the laser tracing measurement system is low,the stability time is short,and the dynamic overshoot error is small.Experimental results show that the greater theαp,the greater the voltage error output by the PSD photoelectric conversion circuit,and the greater the impact on the performance of the laser tracing measurement system.Whenαp=1000 m/V,the error of the output voltage of the PSD photoelectric conversion circuit is the lowest,and the stabilization time is the shortest.

关 键 词：测量与计量 激光追踪测量系统 位置敏感探测器 位移电压转换系数 跟踪性能 

分 类 号：TH71[机械工程—测试计量技术及仪器]