大口径反射镜低应力夹持优化设计  

Optimal Design of Low-Stress Mounting for Large Aperture Mirror

作　　者：马文静 徐振源[1] 曹庭分[1] 张军伟[1] 向勇[1] 陈良明[1] 郑胜亨 Wenjing Ma;Zhenyuan Xu;Tingfen Cao;Junwei Zhang;Yong Xiang;Liangming Chen;Shengheng Zheng(Research Center of Laser Fusion,China Academy of Engineering Physics,Mianyang,Sichuan 621900,China)

机构地区：[1]中国工程物理研究院激光聚变研究中心,四川绵阳621900

出　　处：《中国激光》2020年第11期180-185,共6页Chinese Journal of Lasers

基　　金：国家自然科学基金(U183020005)

摘　　要：为了同时满足激光装置对大口径反射镜面形精度和结构稳定性的控制要求,提出了一种反射镜多自由度解耦的多点夹持方式,通过限位实现对反射镜多自由度的控制,以此避免由夹持带来的附加面形。采用有限元法分析了所提方式的有效性,并通过实验验证了分析方法及该夹持方式的可行性,结果表明采用该反射镜夹持方式带来的附加面形较小,满足反射镜低应力附加夹持面形的要求。在此基础上,对45°倾斜放置的反射镜的面形进行了模拟,探究了不同夹持点位置分布对反射镜面形精度的影响规律,模拟结果表明:为了保证反射镜的面形精度,至少要有一个夹持点位于反射镜的长边。该研究成果对大口径反射镜夹持设计具有重要的指导意义。In order to meet the control requirements of the surface accuracy and structural stability of large aperture mirrors for laser devices,a multi-point mounting method with decoupling of multiple degrees of freedom of the mirror is proposed.The control of multiple degrees of freedom of mirror is realized by limiting position to avoid the additional surface shape caused by mounting.The effectiveness of the proposed method has been analyzed by finite element method,and the feasibility of the analysis method and the mounting method has been verified through experiments.The results show that the additional surface shape brought by the mounting method of the mirror is small,which meets the requirement of the low-stress additional mounting surface of the mirror.On the basis,the surface shape of the mirror placed at a tilt angle of 45°is simulated,and the influences of the position distributions of different mounting points on the surface accuracy of the mirror are explored.Simulation results show that in order to ensure the surface accuracy of the mirror,at least one mounting point should be located on the longer side of the mirror.These results have important guiding significance for the mounting design of large aperture mirrors.

关 键 词：光学设计 大口径反射镜 低应力夹持 面形精度 有限元模拟 

分 类 号：TH242[机械工程—机械制造及自动化]