扫描声学显微镜的扫描技巧探讨  

Scanning Technical Discussion of Scanning Acoustic Microscope

作　　者：刘玲玲 范丹丹 纪帆 谭伟 李文祥 LIULingling;FAN Dandan;JI Fan;TAN Wei;LI Wenxiang(Jiangsu HHCK Advanced Materials Co.,Ltd.,Lianyungang 222047,China)

机构地区：[1]江苏华海诚科新材料股份有限公司,江苏连云港222047

出　　处：《电子工业专用设备》2020年第6期42-45,55,共5页Equipment for Electronic Products Manufacturing

摘　　要：探讨了在SAT(Scanning Acoustic Technology)扫描过程中对分层扫描结果有显著影响的探头频率、探头下部的气泡、样品表面的气泡、气泡的处理方法及浸泡时间等进行了讨论,结果表明,合适频率的探头、有效的气泡去除及在最佳浸泡时间内才能得到正确的分层扫描结果。The probe frequency,the bubbles in the lower part of the probe,the bubbles on the surface of the sample,the treatment methods of the bubbles and optimum soaking time which have a significant influence on the results of SAT scanning are discussed in this paper.The results show that the correct delamination scanning results can be obtained when the proper probe frequency is selected and the bubbles are removed well.

关 键 词：分层 探头频率 气泡 

分 类 号：TN247[电子电信—物理电子学]