耐1000℃高温的Pt/ITO薄膜电极SAW温度传感器  

Pt/ITO thin film electrode SAW temperature sensor working at 1000℃

作　　者：王博文 刘兴鹏 彭斌[1] 李凌[1] 岳虎虎 房赛 张万里[1] WANG Bowen;LIU Xingpeng;PENG Bin;LI Ling;YUE Huhu;FANG Sai;ZHANG Wanli(State Key Laboratory of Electronic Thin Films and Integrated Devices,University of Electronic Science and Technology of China,Chengdu 610054,China;Guangxi Key Laboratory of Precision Navigation Technology and Application,Guilin University of Electronic Technology,Guilin 541004,China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054 [2]桂林电子科技大学广西精密导航技术与应用重点实验室,广西桂林541004

出　　处：《中国测试》2020年第12期67-72,共6页China Measurement & Test

摘　　要：SAW温度传感器具有无线无源的特点,在高温等恶劣环境中具有良好的应用前景。电极的高温稳定性是影响SAW温度传感器件工作温度的重要因素,采用耐高温的压电材料CTGS作为压电基底,通过PLD技术在压电基底表面制备Al2O3/ITO/Pt/Al2O3多层薄膜作为电极,氧化铝作为保护层能够抑制高温下金属薄膜的团聚现象以提高电极的高温稳定性,利用高温下ITO薄膜的导电性来补偿Pt薄膜高温下增大的电阻率,这种多层薄膜结构能够在高温环境中保持较好的稳定性。测试结果表明,所制作的SAW温度传感器可以工作至1000℃,在1000℃环境中持续工作5 h,并具有较好的重复性,这是由于所采用的Pt/ITO薄膜电极在高温下仍具有良好的导电性所致。SAW sensors have important potential applications in harsh environments such as high temperature due to its ability of wireless and passive operation.The high temperature stability of the electrode is the important factors that affect work temperature SAW temperature sensor,the use of high-temperature piezoelectric materials CTGS as piezoelectric substrate,by PLD technology in the piezoelectric substrate surface preparation of Al2O3/ITO/Pt/Al2O3 multilayer film as electrode,alumina as a protective layer metal film can restrain the heat reunion phenomenon in order to improve the high temperature stability of the electrode,the conductivity of ITO thin film with high temperature increases to compensate for Pt thin film under high temperature resistivity of the multilayer film structure can maintain good stability in high temperature environment.The results show that the produced SAW sensor can work up to 1000℃ with good repeatability,is capable of operating continuously at 1000℃ for 5 hours,which is originated from the good conductivity of the Pt/ITO thin film electrode at high temperature.

关 键 词：声表面波 温度传感器 CTGS 多层薄膜电极 

分 类 号：TP391[自动化与计算机技术—计算机应用技术] TB9[自动化与计算机技术—计算机科学与技术]