基于氧化铟纳米带的离子敏场效应晶体管的设计和实现  

Design and Implementation of an Ion-Sensitive Field Effect Transistor Based on Indium Oxide Nanoribbon

作　　者：吴传健 杨敏 王轶卿 WU Chuanjian;YANG Min;WANG Yiqing(College of Electrical Engineering and Control Science,Nanjing Tech University,Nanjin 211816,China)

机构地区：[1]南京工业大学电气工程与控制科学学院,江苏南京211816

出　　处：《测试技术学报》2020年第6期465-469,共5页Journal of Test and Measurement Technology

基　　金：江苏省自然科学基金青年基金资助项目(BK20180687)。

摘　　要：微量溶液pH值的检测在生物医学、食品质量监测以及环境监测等领域有着广泛的应用需求.本文设计了一种基于氧化铟(In2O3)纳米带的离子敏场效应晶体管,并将其用于微量溶液的pH值检测.采用In2O3纳米带为顶部沟道和硅衬底为底部沟道的双层沟道结构,有效提高了pH灵敏度.实验证明,该离子敏场效应晶体管在pH6到pH10范围内表现出良好的灵敏度,达到(74±5)mV/pH,超过常温下的能斯特极限59.2 mV/pH.并以急性心肌梗死标志物cTnI的检测为例,验证了该离子敏场效应晶体管可作为pH传感器用于生物标记物检浓度的检测.The detection of pH value of micro solution has a wide range of applications in biomedicine,food detection and environmental protection.In this work,an ISFET sensor based on In 2O3 nanoribbon is developed for pH detection of micro solutions.A double channel ISFET is designed which includes the In 2O3 nanoribbon top channel and silicon substrate bottom channel so as to realize the pH detection of the micro solutions.Through experiments,the sensitivity of the sensor is 74±5 mV/pH in the range of pH 6 to pH 10,which exceeds the Nernst limit of 59.2 mV/pH at room temperature.Taking the detection of cTnI as an example,the pH sensor can be used to detect the concentration of biomarkers.

关 键 词：氧化铟纳米带 离子敏场效应晶体管 微量溶液 PH检测 

分 类 号：TN386.4[电子电信—物理电子学]