浅析2019年度微系统关键技术进展  

Analysis of Progress of Micro-system Key Technology in 2019

作　　者：杨依宁 刘万成[1] YANG Yi-ning;LIU Wan-cheng(Science and Technology on Electro-Optical Information Security Control Laboratory,Tianjin 300308,China)

机构地区：[1]光电信息控制和安全技术重点实验室,天津300308

出　　处：《光电技术应用》2020年第6期1-7,27,共8页Electro-Optic Technology Application

摘　　要：微系统技术是以微纳尺度理论为支撑,微集成工艺为基础,并通过功能模块集成,实现单一或多种用途融合的综合性前沿技术。应用微系统技术对加速光电系统性能的全面提升、有效降低成本具有重要意义。以2019年度微系统领域关键技术进展为基础,讨论目前光电领域微系统技术的难点问题,为该领域研究人员提供参考。Micro-system technology is an advanced comprehensive technology which is supported by micro-nano theory and based on micro-integration method.Through the integration of functional modules,the micro-system technology can achieve single or multi-purpose micro systems.The application of the technology is of great significance to accelerate the overall improvement of the electro-optical system performance and meanwhile reduce the cost effectively.Based on the key technology progress in the field of micro-system in 2019,the current difficult problems are discussed,which provides references for researchers in this field.

关 键 词：微系统技术 微传感器 微处理器 微集成技术 

分 类 号：TN211[电子电信—物理电子学]