铝钪合金靶材的制备及退火工艺研究  

Study on Preparation and Annealing Process of Aluminum-Scandium Alloy Target Material

作　　者：张闻扬 刘华 王志坚 黄美松 文康 马小波 周煌 ZHANG Wen-yang;LIU Hua;WANG Zhi-jian;HUANG Mei-song;WEN Kang;MA Xiao-bo;ZHOU Huang(Hunan Rare Earth Metal Material Institute,Changsha 410126,China;Hunan Key Laboratory for Rare Earth Functional Materials,Changsha 410126,China)

机构地区：[1]湖南稀土金属材料研究院,湖南长沙410126 [2]稀土功能材料湖南省重点实验室,湖南长沙410126

出　　处：《稀有金属与硬质合金》2020年第6期73-76,共4页Rare Metals and Cemented Carbides

基　　金：湖南省战略性新兴产业科技攻关与重大科技成果转化专项(2018GK4001);湖南省科技创新计划项目(2017TP1031)。

摘　　要：制备了铝钪合金(Al-20%Sc)靶材,并研究不同退火工艺对合金靶材微观组织和显微硬度的影响。结果表明:退火后,靶材样品晶粒形状发生变化,由棱角分明变得圆润,晶粒尺寸变大,晶界光滑;样品退火前硬度为70.37 HV0.1,随着退火温度的升高和时间的延长,合金硬度先明显降低后趋于稳定,最佳退火工艺为620℃×60min,此时靶材样品硬度降至55.03HV0.1,但其塑性提高,有利于后续机加工。Al-Sc alloy(Al-20%Sc)target material was prepared,and the influence of different annealing processes on microstructure and microhardness of the alloy target material was investigated.The results show that after the target sample is annealed,its grain shape changes from angular to rounded,grain size becomes larger,and grain boundaries are smooth.Microhardness of the sample before annealing is 70.37 HV0.1.With the increase of annealing temperature and time,alloy microhardness significantly decreases at first and then stabilizes.The optimal annealing conditions are 620℃and 60min.The target sampleannealed under the above conditions has the decreased microhardness of 55.03HV0.1,but its plasticity is improved,which is conducive to subsequent machining.

关 键 词：铝钪合金 Al-20%Sc 靶材 退火 微观组织 显微硬度 温度 时间 

分 类 号：TG146.451[一般工业技术—材料科学与工程]