多线切割机主轴支承三角架的优化设计  

Optimization design of triangular support for the multi-wire cutting machine’s spindle system

作　　者：朱盾 高志[1] ZHU Dun;GAO Zhi(School of Mechanical and Power Engineering,East China University of Science and Technology,Shanghai 200237)

机构地区：[1]华东理工大学机械与动力工程学院,上海200237

出　　处：《机械设计》2020年第11期53-58,共6页Journal of Machine Design

摘　　要：多线切割机是半导体材料切割行业的主导设备,而多线切割机主轴系统的动力学特性对半导体晶片的加工质量具有较大影响。其中主轴系统中的三角架作为支承主轴的载体,其动力学性能的优劣直接影响主轴系统整体性能的好坏。使用Solid Works软件建立了三角架模型,并通过ANSYS软件进行静力和模态分析,找出了三角架刚度的不足。通过对三角架连接梁的多目标优化设计和对三角架前支承板的轻量化设计,最终在降低三角架质量的同时,提高了其动静态性能。The multi-wire cutting machine is the leading equipment in the semiconductor material cutting industry,and the dynamic characteristics of its spindle system have great influence on the processing quality of semiconductor chips. The triangular support in the spindle system is the carrier which is used to support the spindle,and its dynamic performance directly affects the the spindle system. In this article,the Solid Works software is applied to work out a triangular-support model,and the ANSYS software is used for the static and modal analysis,in order to find out the insufficient stiffness of the triangular support. Based on the multi-objective optimization design of the connecting beam and the lightweight design of the front supporting plate,the triangular support,with a small mass,has improved dynamic and static performance.

关 键 词：多线切割机 三角架 ANSYS 多目标优化 

分 类 号：TH122[机械工程—机械设计及理论]