多维色谱技术检测电子气SF6中10种痕量杂质的研究  

Study on Detection of Ten Trace Impurities in Electronic Gas SF6 by Multi-dimensional Chromatography

作　　者：魏王慧 于瑞祥[1] 姜阳[1] 高艳秋[1] 董翊[1] 任逸尘 陈鹰[1] WEI Wanghui;YU Ruixiang;JIANG Yang;GAO Yanqiu;DONG Yi;REN Yichen;CHEN Ying(Shanghai Institute of Measurement and Testing Technology, Shanghai 201203, China)

机构地区：[1]上海市计量测试技术研究院,上海201203

出　　处：《低温与特气》2020年第6期37-40,共4页Low Temperature and Specialty Gases

摘　　要：使用多维气相色谱,通过反吹、中心切割等操作技术,对六氟化硫电子气中的10种杂质检测进行了方法开发,并系统地描述了三种电子气检测方法的开发过程和经验技巧,方法重复性好、检测效率高,可作为标准操作规范向社会开放共享。This paper uses multi-dimensional gas chromatography to develop methods for the detection of 10 impurities in sulfur hexafluoride electronic gas by back-flushing and center-cutting,and systematically describes the development process and experience of three electronic gas detection methods skills,methods are reproducible,and detection efficiency is high,which can be opened to the society as a standard operating specification.

关 键 词：多维色谱 六氟化硫气体 杂质 反吹 中心切割 

分 类 号：O657.7[理学—分析化学]