适用于TERS系统的金修饰钨丝探针制备和研究  

Study and Preparation of Gold Modified Tungsten Tip for Tip-enhanced Raman Spectroscopy

作　　者：都伯林 高思田[2] 黄鹭[2] 施玉书[2] 曲兴华[1] DU Bo-lin;GAO Si-tian;HUANG Lu;SHI Yu-shu;QU Xing-hua(College of Precision Instrument and Opto-electronics Engineering,Tianjin University,Tianjin 300072,China;National Institute of Metrology,Beijing 100029,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]中国计量科学研究院,北京100029

出　　处：《计量学报》2020年第12期1456-1460,共5页Acta Metrologica Sinica

基　　金：国家重点研发计划(2016YFF0200602);国家重点研发专项(2016YFA0200901)。

摘　　要：提出了一种适用于针尖增强拉曼光谱(TERS)系统的金修饰钨丝探针,研究了其制备方法。有限元仿真设计了针尖的形状为内弧形针尖,并进行二氧化硅粘结层和金颗粒外层双镀膜结构纳米修饰;通过调节实验室自主研制的电化学腐蚀探针装置的溶液浓度、电机位移和浸入深度制备符合形状要求的钨丝针尖;在此基础上,通过电感耦合等离子体化学气相沉积技术(ICP-CVD)进行二氧化硅涂层镀制,电子束加热物理气象沉积技术(EB-PVD)进行金涂层镀制。最终完成该探针制备,双层镀膜后针尖曲率半径达30~80 nm,可用于TERS研究。A gold modified tungsten tip for tip-enhanced Raman spectroscopy(TERS)is proposed and the preparation method is studied.An inner arc-shaped tip was designed through finite element analysis,and then modified with a gold nano-particles layer after a silicon dioxide bonding layer was deposited.The tungsten tips were prepared by adjusting the concentration of solution,motor displacement and immersion depth of the electrochemical corrosion probe device developed by the laboratory independently.Based on the design,an inductively coupled plasma chemical vapor deposition(ICP-CVD)technology was employed to deposit the SiO 2 coating,and the electron beam physical vapor deposition(EB-PVD)to prepare the gold nanoparticles layer.Finally,the preparation of the tip is completed,and the radius of the tip after double coating is 30~80 nm,which can be used for TERS research.

关 键 词：计量学 钨探针 针尖增强拉曼光谱 纳米颗粒修饰 

分 类 号：TB92[一般工业技术—计量学]