高精度微结构玻璃光学元件阵列模压技术研究进展  

Research progress of high precision micro structure glass optical element array molding technology

作　　者：舒成松 董浩 尹韶辉[1] 大和紀雄 李四清 SHU Cheng-song;DONG Hao;YIN Shao-hui;YAMATO Norio;LI Si-qing(National Engineering Research Center for High Efficiency Grinding, Hunan University, Changsha 410082, China;Sumita Optics(Dongguan) Co., Ltd, Dongguan 523397, China;Hunan Chiopt Optical Technology Co., Ltd, Changsha 410082, China)

机构地区：[1]湖南大学国家高效磨削工程技术研究中心,湖南长沙410082 [2]住田光学(东莞)有限公司,广州东莞523397 [3]湖南长步道光学有限公司,湖南长沙410082

出　　处：《光学精密工程》2020年第9期1967-1985,共19页Optics and Precision Engineering

基　　金：国家重点研发计划资助项目(No.2017YFE0116900)。

摘　　要：高精度微结构玻璃光学元件在光学系统、精密测量、微流控芯片等领域的应用日趋广泛,而阵列模压成形技术是生产玻璃光学元件最具革命性的制造技术,具有高精度、无污染、净成形、低成本等特点,可望实现高精度微结构玻璃元件的低成本和稳定性量产。本文介绍了微结构玻璃光学元件阵列模压技术的优势及应用需求,综述了国内外近年来利用阵列模压技术制造微结构玻璃光学元件的重要研究进展,包括模具材料及加工技术、玻璃材料及热力学特性、阵列模压过程有限元仿真及模压工艺试验、微结构玻璃元件质量检测技术等。重点阐述了微结构光学元件制备过程中在模具材料、镀膜材料、模具加工设备及工艺、阵列模压仿真与成形工艺等方面所取得的新成果和面临的技术难题。最后,对微结构玻璃光学元件阵列模压成形制造技术的发展趋势进行了展望。High-precision microstructure glass optical elements are widely used in several applications,including optical systems,precision measurements,and microfluidic chips.The most revolutionary technique for the production of glass optical elements is the use of array molding technology,which is capable of high precision,net forming,and low-cost manufacturing in addition to being pollution free.This technique is also expected to achieve stable mass production of high-precision microstructure glass elements at low costs.In this paper,the advantages and application requirements of the array molding technology for microstructure glass optical elements are introduced.Moreover,global research developments in the manufacturing of microstructure glass optical elements using array molding technology are summarized.Recent progress includes research on mold material and processing technology,glass material and thermodynamic characteristics,finite element simulation,molding process test in the array molding process,and quality of the microstructure glass element detection technology.Novel achievements and technical problems in the manufacturing process are described,primarily focusing on the die material,coating material,die processing equipment and technology,array molding simulation,and forming technology.Finally,future developments in array molding manufacturing technology for microstructure glass optical elements are considered.

关 键 词：微结构光学元件 玻璃材料 模具加工 有限元仿真 阵列模压成形 

分 类 号：TB133[机械工程—光学工程]