微间隙气体放电击穿过程分析  

Analysis of Breakdown Process of Micro-Gap Gas Discharge

作　　者：王林华 孙岩洲[1] 董克亮 刘绪光 WANG Linhua;SUN Yanzhou;DONG Keliang;LIU Xuguang(School of Electrical Engineering and Automation,Henan Polytechnic University,Jiaozuo He’nan 454000,China)

机构地区：[1]河南理工大学电气工程与自动化学院,河南焦作454000

出　　处：《电子器件》2020年第6期1197-1202,共6页Chinese Journal of Electron Devices

基　　金：国家自然科学基金项目(U1204506)。

摘　　要：为了对微米尺度气体间隙下放电击穿过程进一步研究,在大气压空气环境下进行了电极间距为1μm^100μm的直流击穿实验。绘制了击穿电压曲线与Paschen曲线对比,针对1μm^10μm击穿电压偏离Paschen曲线进行分析。通过推导计算,得出在1μm^10μm时随着外加电压的增加,阴极较高的离子数密度将会产生较高的附加电场,附加电场随着电极间距的增加而减小,从而在微间距下存在较强的离子增强效应;最后,结合离子增强效应二次系数γ'与Townsend二次系数γ的比值,γ'/γ随电极间距d的变化曲线得出,1μm^5μm时,放电过程是由离子增强效应场发射主导发生,且随着间距增大离子增强效应逐渐减弱。在10μm^100μm时,击穿电压的变化基本符合Paschen曲线,其放电过程可以用汤森雪崩理论解释。In order to study the process of discharge breakdown in micro-gap,the DC breakdown experiment with electrode gap of 1μm^100μm was carried out in atmospheric air.The breakdown voltage curve is compared with Paschen curve,and the deviation of 1μm^10μm breakdown voltage from Paschen curve is analyzed.By derivation and calculation the ion number density near cathode,it is concluded that the higher ion number density of cathode will produce higher additional electric field with the increase of applied voltage in the range of 1μm^10μm,and the additional field will decrease with the increase of electrode spacing,so there is a strong ion enhancement effect in the micro gap.Finally,combined with the ratio of secondary coefficientγ'of ion enhancement effect and secondary coefficientγof Townsend,according to the change curve ofγ'/γwith electrode spacing,when the electrode spacing is 1μm^5μm,the discharge process is dominated by the field emission of ion enhancement effect,and the ion enhancement effect gradually weakens with the increase of electrode spacing.At 10μm^100μm,the change of breakdown voltage is basically consistent with Paschen curve,and its discharge process can be explained by Townsend avalanche theory.

关 键 词：微间隙 Paschen曲线 离子增强效应 场发射 γ系数 

分 类 号：TN13[电子电信—物理电子学]