Ti70-xTa15Zr15Fex(x=0.3、0.6、1.0)形状记忆合金薄膜的马氏体相变与阻尼行为  

Martensitic Transformation and Damping Behavior of TiTaZrFe(x=0.3,0.6,1.0)Shape Memory Thin Films

作　　者：郑晓航 宁睿 段佳彤 蔡伟[1] ZHENG Xiaohang;NING Rui;DUAN Jiatong;CAI Wei(Institue of Materials Science and Engineering,Harbin Institute of Technology,Harbin 150006,China;Center of Science and Technology,China Academy of Engineering Physics,Mianyang 621900,China)

机构地区：[1]哈尔滨工业大学材料科学与工程学院,哈尔滨150006 [2]中国工程物理研究院科技信息中心,绵阳621900

出　　处：《金属学报》2020年第12期1690-1696,共7页Acta Metallurgica Sinica

基　　金：国家自然科学基金项目Nos.51971083和51731005。

摘　　要：采用磁控溅射制备Ti70-xTa15Zr15Fex(x=0.3、0.6、1.0,原子分数,%)合金薄膜,通过XRD、TEM、弯曲法和动态热机械分析研究Fe元素含量对合金薄膜组织结构、马氏体相变、力学性能和阻尼特性的影响。结果表明,Ti70-xTa15Zr15Fex(x=0.3、0.6、1.0)合金薄膜在室温下为母相与马氏体相共存,逆马氏体相变开始温度高于100℃,具有双程记忆效应。添加Fe元素可以提高薄膜的塑性和强度,延伸率可达到12.8%(x=1.0)。薄膜在升温降温过程中均可观察到较高的弛豫型内耗峰,当Fe含量为1.0%时,弛豫内耗峰最大值可达到0.116。In recent years,there has been a rapid development in microelectromechanical systems owing to their lightweight and integration with small volume.The microactuater bears low-frequency vibrations during operations,which affects the safety and stability of the device.Ti-Ta-Zr-Fe thin film is a hightemperature shape memory alloy film,which has good shape memory effect and thermal stability.The addition of Fe can improve the plasticity of the film and make it promising to use in high-temperature miniature damping devices.Ti70-xTa15Zr15Fex(x=0.3,0.6,and 1.0,atomic fraction,%)shape memory thin films were prepared by direct-current magnetron sputtering.The effect of the Fe content on the microstructures,martensitic transformation,mechanical properties,and damping behavior was studied by XRD,TEM,bending test,and dynamic mechanical analysis.It was found that the room-temperature phase composition of the alloy films with different Fe contents were in the parent and martensite phases.The reverse martensitic transformation temperature of the thin films was above 100℃,and the films exhibited the two-way shape memory effect.The addition of Fe enhanced the ductility and strength of the film.When the Fe content was 1.0%,the elongation could reach up to 12.8%.During the heating and cooling processes,the relaxation type friction peak was observed.The damping capacity during the relaxation processof the film containing 1.0%Fe could reach up to 0.116.

关 键 词：形状记忆合金薄膜 马氏体相变 阻尼特性 

分 类 号：TG139[一般工业技术—材料科学与工程]