基于静电驱动的平行板式微执行器的静态吸合现象的研究  

Study on static absorption of parallel plate microactuator based on electrostatic drive

作　　者：李伟华 Li Weihua(Suzhou Borui measurement and Control Equipment Co.LTD,Suzhou Jiangsu,215000)

机构地区：[1]苏州博睿测控设备有限公司,江苏苏州215000

出　　处：《电子测试》2021年第2期53-56,共4页Electronic Test

摘　　要：本文先讨论了基于静电驱动的平行板式微执行器在忽略边缘效应下的静态吸合现象,之后在前面研究的基础上,进一步分析了该微执行器在考虑边缘效应下的静态吸合现象,最后建立该微执行器的模型,并设置参数,仿真得到结果证明静态吸合现象的发生。This article first discusses the parallel plate decline of actuators based on electrostatic drive under the ignore the edge effect of static absorption phenomenon,after the research in front,on the basis of further analysis of the micro actuators under considering the edge effect of static absorption phenomenon,finally established the model of the micro actuators,and set the parameters,the simulation results prove that the static and off.

关 键 词：吸合现象 边缘效应 静态 静电微执行器 

分 类 号：TH-39[机械工程]