高温光纤法珀压力传感器研究进展  

Review of High-temperature Fiber-optic Fabry-Perot Pressure Sensors

作　　者：高红春 唐才杰[1,2] 蓝天 王学锋[1,2] GAO Hong-chun;TANG Cai-jie;LAN Tian;WANG Xue-feng(Beijing Aerospace Control Device Institute,Beijing 100854,China;Beijing Engineering Research Center of Optical Fiber Sensing System,Beijing 100094,China)

机构地区：[1]北京航天控制仪器研究所,北京100854 [2]北京光纤传感系统工程技术研究中心,北京100094

出　　处：《仪表技术与传感器》2020年第12期26-31,共6页Instrument Technique and Sensor

摘　　要：光纤法珀压力传感器具有耐高温、体积小、质量轻、抗电磁干扰、本征安全等优势,在航空航天、石油电力、化工冶炼等领域具有广泛的应用前景。本文从工作原理、探头材料及制作、传感器封装3个方面对高温光纤法珀压力传感器的研究进行了分析总结,并在此基础上进行了展望。蓝宝石和碳化硅在超高温(1500~1600℃)环境下仍然具有优良的机械性能,是制备高温光纤法珀压力传感器的理想材料,研究方向将集中于探头元件集成技术以及传感器封装技术。Fiber-optic Fabry-Perot pressure sensor has many advantages including high-temperature resistance,small size,light weight,anti-electromagnetic interference,intrinsic safety,etc.It has wide application prospects in aerospace,petroleum and electricity,chemical smelting,and other fields.In this paper,high-temperature fiber-optic Fabry-Perot pressure sensors were discussed and reviewed in three aspects,working principle,probe material and fabrication,and sensor packaging.And on this basis,the prospect is made.Sapphire and silicon carbide are ideal materials for fabricating high-temperature fiber-optic Fabry-Perot pressure sensors considering their excellent mechanical properties at ultra-high temperature(1500~1600℃).The researches will focus on probe components integration technology and sensor packaging technology.

关 键 词：光纤传感器 法珀干涉仪 高温 压力 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置]