一种带有F-P标准具测量量块的白光干涉仪信号仿真  

Signal simulation of white light interferometers withF-P etalons to measure gauge blocks

作　　者：张宝武 张成悌[2] 余桂英 薛靓[2] 付天坤 汤江文[2] 王道档 伍俊宇 孔明 ZHANG Baowu;ZHANG Chengti;YU Guiying;XUE Liang;FU Tiankun;TANG Jiangwen;WANG Daodang;WU Junyu;KONG Ming(College of Metrology and Measurement Engineering,China Jiliang University,Hangzhou 310018,China;National Institute of Measurement and Testing Technology,Chengdu 610021,China)

机构地区：[1]中国计量大学计量测试工程学院,浙江杭州310018 [2]中国测试技术研究院,四川成都610021

出　　处：《中国计量大学学报》2020年第4期409-414,共6页Journal of China University of Metrology

基　　金：国家自然科学基金项目(No.51875543);广西高校光电信息处理重点实验室开放基金项目(No.KFJJ2017-02)。

摘　　要：目的:介绍了一种带有标准具测量量块的白光干涉仪。它可以将量块长度通过标准具间隔长度直接溯源至波长基准,能够利用一个标准具的光学倍乘特性实现多种尺寸量块的直接测量。方法:利用matlab平台模拟仿真研究了这种干涉仪的干涉信号,利用万工显对干涉信号进行了测量。结果:测量表明此新型量块测量的干涉仪中两条零级黑条纹之间的错位精度可以达到小于百分之一个干涉条纹,即小于3 nm以内。结论:本文的研究为量块的精确测量提供了崭新的技术手段。Aims:One white interferometer with an F-P etalon to measure gauge blocks was presented.This interferometer could be used to trace the length of gauge blocks to the reference wavelength by the interval of an F-P etalon.It could directly carry out the measurement of multiple sizes of gauge blocks by one etalon benefited from its optical multiplicative property.Methods:The rinterference signals were simulated with matlab.The simulated interference fringe figures were measured by using the universal tool microscope.Results:The distance between two zero order black interference fringes could be precisely measured less than 3 nm which was within one percent of one interference fringe.Conlusions:The study presents a new method to precisely measure gauge blocks.

关 键 词：计量学 量块 白光干涉仪 F-P标准具 

分 类 号：TG815[金属学及工艺—公差测量技术]