热回收冷水机组在半导体芯片工厂的应用介绍  

Introduction of Heat Recovery Chiller Designed In Semiconductor Wafer Fab

作　　者：王辉 Wang Hui

机构地区：[1]益科德(上海)有限公司

出　　处：《洁净与空调技术》2020年第4期67-72,共6页Contamination Control & Air-Conditioning Technology

摘　　要：以某半导体芯片工厂扩建项目空调水设计为案例,通过分析半导体厂房冷热负荷点,介绍了热回收冷水机组选型以及相关水系统设计。从技术上说明了在半导体工厂应用热回收冷水机组的优势。再通过分析比较热回收机组方案和常规冷水机组+锅炉方案在投资成本和运行成本上的差异,论证了热回收冷水机组在半导体芯片工厂应用上有着显著的经济优势,应用经验值得推广。The article take the wet mechanical design for some semiconductor Fab expansion project as a case.The Heat recovery chiller selection and associated water system design were introduced and the advantage of using the Heat recovery chiller in a semiconductor fab was validated technically by analyzing the feature of heating and cooling load in the semiconductor Fab.Through further analysis and comparison on initial investment and operation cost between Heat recovery chiller option and tradition chiller+boiler option,It shows the significant advantage on cost saving by using Heat recovery chiller in semiconductor Fab,The experience of using Heat recovery chiller in semiconductor is worth popularizing.

关 键 词：热回收冷水机组 节能 水系统设计 经济性分析 

分 类 号：TU831[建筑科学—供热、供燃气、通风及空调工程]