Pd掺杂SnO2厚膜CO2气体传感器的制备及其气敏特性研究  

Preparation and characterization of Pd-filled SnO2 thick film CO2 sensor

作　　者：毕道广 罗兵[2] 张福增[2] 王婷婷 姚英邦 BI Daoguang;LUO Bing;ZHANG Fuzeng;WANG Tingting;YAO Yingbang(School of Materials and Energy,Guangdong University of Technology,Guangzhou 510006,China;China Southern Power Grid Co.,Ltd.,Guangzhou 510623,China)

机构地区：[1]广东工业大学材料与能源学院,广东广州510006 [2]中国南方电网责任有限公司,广东广州510623

出　　处：《电子元件与材料》2021年第1期11-18,共8页Electronic Components And Materials

基　　金：特高压工程技术(昆明、广州)国家工程实验室开放基金(NEL201803,NEL201904)。

摘　　要：当前CO2的过度排放引发了一系列的环境问题,CO2的检测技术成为气体传感器研究领域的热点。半导体气敏传感器是气体传感器研究的主流方向之一,其中丝网印刷法是制备厚膜传感器的最常见的方法。本文采用纳米SnO2作为主要的气敏材料,制备了不同Pd掺杂含量的SnO2浆料,然后采用丝网印刷法制备了SnO2厚膜CO2气体传感器。研究发现,当Pd的含量为SnO2的1%(质量分数)时,传感器在258℃工作温度下,对CO2有最大的响应值1.98。该传感器能够检测的CO2浓度下限为1000ppm,其响应值随着CO2浓度的升高而增大。Excessive emissions of CO2 has caused environmental problems,and CO2 detection is thus one of the hot topics for scientific research.The semiconductor gas sensors have become one of the most important partss of gas sensors.By the way,screen printing is often used to prepare thick film sensors.In this paper,nano SnO2 materials was selected as the major gas-sensitive material and the slurries based on SnO2 nanoparticles with different Pd filler contents were prepared.The SnO2 thick film CO2 gas sensor was prepared by screen printing method.It is found that when the Pd content is 1%(weight base:SnO2),the thick-film gas sensor exhibits the best response at 258℃.The lower detection limit for the SnO2 gas sensor is 1000 ppm and the sensitivity increases with increasing concentration of CO2.

关 键 词：CO2气体传感器 厚膜 SNO2 Pd掺杂 

分 类 号：TM535[电气工程—电器]