单色球差校正扫描透射电子显微镜的实验室设计  

Laboratory design for a Nion monochromated aberration-corrected scanning transmission electron microscope

作　　者：时金安 胡书广 夏艳 周武 SHI Jin-an;HU Shu-guang;XIA Yan;ZHOU Wu(University of Chinese Academy of Sciences,Beijing 100049;China Electronics Engineering Design Institute,Beijing 100142,China)

机构地区：[1]中国科学院大学,北京100049 [2]中国电子工程设计院有限公司,北京100142

出　　处：《电子显微学报》2020年第6期715-721,共7页Journal of Chinese Electron Microscopy Society

基　　金：中国科学院大学专项经费.

摘　　要：随着扫描透射电子显微镜(STEM)球差校正技术以及电子束单色器技术的出现,电镜的空间分辨率和能量分辨率都有了革命性的提高。然而这些技术的出现只是使仪器的精度提高并不是使仪器对环境的要求更宽松。相反,为了达到更高的精度,仪器对于实验环境的要求变得越来越严格,所以环境的稳定性经常成为仪器精度的限制因素。本篇文章介绍了如何针对超高能量分辨率和空间分辨率的单色球差校正扫描透射电子显微镜而建造一套满足要求的实验室。其中包括微振动控制、磁场干扰、温度波动、噪声和独立接地电阻以及洁净度等对电镜性能的影响以及应对方法。The invention of aberration corrector and monochromator has brought revolutionary improvement in spatial resolution and energy resolution to scanning transmission electron microscopes(STEM). However, these state-of-the-art microscopes also impose stricter requirements for environmental stabilities for achieving the expected performance, as the environmental instabilities are often the limiting factors to the ultimate resolution of these high-end microscopes. This article introduces how to reconstruct a laboratory to meet the pre-installation environmental requirements for a Nion monochromated aberration-corrected STEM with ultra-high spatial and energy resolution. It includes the influence of micro vibration control, magnetic field interference, temperature fluctuation, noise, independent grounding resistance and cleanliness on the performance of the electron microscope. and the measurements to meet the specifications for environmental stabilities.

关 键 词：微振动 磁场干扰 精密温控 独立接地 

分 类 号：O766.1[理学—晶体学] TN16[电子电信—物理电子学]