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作 者:孙舒鹏 孙炎辉 董玉华 侯腾跃 郑雁公[2] 王兢[3] 张钊睿 SUN Shupeng;SUN Yanhui;DONG Yuhua;HOU Tengyue;ZHENG Yangong;WANG Jing;ZHANG Zhaorui(College of Information and Communication Engineering,Dalian Minzu University,Dalian 116600,China;Faculty of Electrical Engineering and Computer Science,Ningbo University,Ningbo 315020,China;School of Electronic Science and Technology,Dalian University of Technology,Dalian 116024,China;College of Mechanical and Electronic Engineering,Dalian Minzu University,Dalian 116600,China)
机构地区:[1]大连民族大学信息与通信工程学院,大连116600 [2]宁波大学信息科学与工程学院,宁波315020 [3]大连理工大学电子科学与技术学院,大连116024 [4]大连民族大学机电工程学院,大连116600
出 处:《硅酸盐通报》2021年第1期280-295,311,共17页Bulletin of the Chinese Ceramic Society
基 金:辽宁省自然科学基金(20180550624)。
摘 要:半导体金属氧化物是一种常见的气敏材料,以该类型材料作为敏感材料可以设计出具有不同传感原理的气体传感器,但选择性和灵敏度不佳却一直是该类气体传感器的不足。为了解决该问题,常将气敏材料与沸石进行复合,制备金属氧化物/沸石气体传感器,利用沸石独特的物理、化学特性来改善金属氧化物的气敏特性。近年来,许多研究者对金属氧化物/沸石气体传感器进行了研究,使该类传感器对目标气体的选择性与灵敏度均有了提升。为了更好地总结已有的研究内容,以气体传感器的检测原理为主线,对金属氧化物/沸石气体传感器进行了总结,结合沸石对气敏特性的改善进行归纳梳理,从传感器的制备方法、气敏特性和敏感机理等多方面进行了详细的整理和分析,为后续此类工作的开展提供基础。As a common gas sensitive material,semiconductor metal oxide can be used as sensitive material to design gas sensors with different sensing principles.However,poor selectivity and sensitivity are always the shortcomings of this kind of gas sensors.In order to solve this problem,gas sensitive materials are often compounded with zeolite to prepare metal oxide/zeolite gas sensors,and improve the gas sensing characteristics of metal oxides with unique physical and chemical characteristics of the zeolite.In recent years,many researchers have studied the metal oxide/zeolite gas sensor,and the selectivity and sensitivity of this kind of sensor to target gas have been improved.In order to better summarize the existing research,focusing on the detection principle of gas sensors,this study concluded the metal oxide/zeolite gas sensors in combination with concluding the improvement of gas sensing characteristics by the zeolite,made a detailed arrangement and analysis from perspective of preparation method,gas sensing characteristics and sensitive mechanism of sensors,which provided a basis for the subsequent development of such work.
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