一种压阻式压力传感器全温区温度补偿方法  

A full-temperature-range temperature compensation method for piezoresistive pressure sensor

作　　者：田青林 陈红亮 陈洪敏 李粮 闫文吉 TIAN Qinglin;CHEN Hongliang;CHEN Hongmin;LI Liang;YAN Wenji(AECC Sichuan Gas Turbine Establishment,Chengdu 610500,China;Sichuan Tianli Technology Co.,Ltd.,Mianyang 621010,China)

机构地区：[1]中国航发四川燃气涡轮研究院,四川成都610500 [2]四川天利科技有限责任公司,四川绵阳621010

出　　处：《中国测试》2021年第1期49-53,共5页China Measurement & Test

摘　　要：针对压阻式压力传感器因热零点漂移、热灵敏度改变以及热迟滞效应引起的误差,提出一种压阻式压力传感器全温区温度补偿方法。该方法是在温升和温降全温区样本采集的数据基础上,采用最小二乘法曲面拟合原理对压阻式压力传感器进行数字补偿。通过对传感器进行实验标定和误差分析,并与常用的单一温升样本采集并进行数字补偿的方法进行对比,结果表明该方法能有效降低传感器因热迟滞效应引入的误差,提高传感器在全温区内标定点和非标定点的测试精度。同时,该方法校准参数少,计算量相对较小,对于硬件要求较低,达到在性能和成本之间的良好平衡,是一种实用性较强的在线补偿方法,具有较强的工程应用价值。For errors in a piezoresistive pressure sensor caused by thermal shifts of zero output and sensitivity as well as thermal hysteresis effect, a full-temperature-range temperature compensation method was put forward, which uses least square polynomial surface fitting to compensate piezoresistive pressure sensor based on data acquisition from sampling in a full temperature range including both temperature rise and drop.Through sensor test calibration and error analysis, as well as comparison with the common digital compensation method based on sampling only in temperature rise, it was proved that this method can effectively reduce errors caused by thermal hysteresis effect, and improve the sensor test accuracy at calibration points and non-calibration points in a full temperature range. Meanwhile, this method needs less calibration parameters, less calculation and lower hardware requirements, thus reaching a better balance between performance and cost, making it a more practical online compensation method with quite a value in engineering applications.

关 键 词：压阻式压力传感器 温度补偿 全温区 最小二乘法曲面拟合 热迟滞效应 

分 类 号：TP212[自动化与计算机技术—检测技术与自动化装置] TH812[自动化与计算机技术—控制科学与工程]