用于数据中心发射端的同侧阵列波导光栅复用器  

Same Side Arrayed Waveguide Grating Multiplexer for Data Center Transmitter

作　　者：王亮亮 张家顺[1,2] 安俊明 胡炎彰[3] 单崇新[1] WANG Liangliang;ZHANG Jiashun;AN Junming;HU Yanzhang;SHAN Chongxin(Henan Diamond Optoelectronic Materials and Devices Key Laboratory,School of Physics and Engineering,Zhengzhou University,Zhengzhou 450001,China;State Key Laboratory of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;Henan Key Laboratory of Optoelectronic Circuit and Integration,Henan Shi Jia Photons Technology Co.,Ltd,Hebi,Henan 458030,China)

机构地区：[1]郑州大学物理学院河南省金刚石光电材料与器件重点实验室,郑州450001 [2]中国科学院半导体研究所集成光电子国家重点实验室,北京100083 [3]河南仕佳光子科技股份有限公司河南省光电芯片与集成重点实验室,河南鹤壁458030

出　　处：《光子学报》2021年第1期165-172,共8页Acta Photonica Sinica

基　　金：国家自然科学基金(No.61805232);郑州重大科技项目(No.18XTZX12008)。

摘　　要：针对数据中心互连用波分复用芯片需求,采用折射率差为1.5%的硅基二氧化硅光波导,设计并制备了应用于数据中心发射端的同侧、小型化、低损耗4通道粗波分复用芯片,尺寸为6.6 mm×2.2 mm,最小插入损耗小于2.33 dB,1 dB带宽大于11.35 nm,偏振相关损耗小于0.14 dB,波长精准度偏差小于0.38 nm。完全满足数据中心光互连波分复用芯片商用指标要求。A silicon based optical waveguide with 1.5%refractive index difference is used for data center interconnect on wavelength-division multiplexing chip.A 4-channel chip with same side,small size and low loss is designed and fabricated for data center transmitter.The size of the chip is 6.6 mm×2.2 mm,the minimum insertion loss is less than 2.33 dB,the 1 dB bandwidth is more than 11.35 nm,the polarization dependent loss is less than 0.14 dB,and the wavelength accuracy deviation is less than 0.38 nm.The optical performance can meet the wavelength-division multiplexing commercial specifications of the data center optical interconnect.

关 键 词：光波导 数据中心互连 粗波分复用 硅基二氧化硅 发射组件 同侧 

分 类 号：TN2[电子电信—物理电子学]