微纳米光学测量的严格耦合波分析方法  

Rigorous Coupled Wave Analysis(RCWA)Method for Micro-nano Optical Measurement

作　　者：李琪[1] 施玉书[1] 李伟[1] 黄鹭[1] 李适[1] 高思田[1] 张树[1] LI Qi;SHI Yushu;LI Wei;HUANG Lu;LI Shi;GAO Sitian;ZHANG Shu(National Institute of Metrology,Beijing 100029,China)

机构地区：[1]中国计量科学研究院,北京100029

出　　处：《计量科学与技术》2020年第12期3-6,11,共5页Metrology Science and Technology

基　　金：国家质量基础的共性技术研究与应用(2016YFF0200602)。

摘　　要：在微纳米尺度光学测量领域中,严格耦合波(RCWA)方法将光看作空间传播的电磁波,然后应用麦克斯韦方程组电磁边界连续条件,求解电磁波前向和后向衍射模型,并测量对应的透射和反射。在RCWA仿真中,首先对被测对象应用分层电磁模型,划分成多层不同几何尺寸及介电常数叠加结构,然后应用传输矩阵法计量不同衍射级数的电磁场,最后对空间电场和磁场分量进行合成,从而得到纳米几何结构准确的衍射场。In the field of micro/nano scale optical measurement,the RCWA method considers the light as electromagnetic waves transferring within space,which utilizes continuous boundary condition for electromagnetic field that deduced from Maxwell equation to solve the electromagnetic forward and backward diffraction pattern,and corresponding transmit and reflect measurement.The RCWA simulation process first divides the object into a multi-layer stacked structure with different dielectric parameters,then applies the transfer-matrix method to calculate the diffraction order.Finally,the spatial electric field and magnetic field components are synthesized to obtain an accurate diffraction field of the nano-geometric structure.

关 键 词：微纳尺度 光学测量 傅里叶空间 严格耦合波 二维周期结构 

分 类 号：O432.2[机械工程—光学工程] TN401[理学—光学]