用于微位移测量的迈克尔逊激光干涉仪综述  

Review of Michelson Laser Interferometer for Micro Displacement Measurement

作　　者：王冬 崔建军[2] 张福民 闵帅博 陈恺 WANG Dong;CUI Jian-jun;ZHANG Fu-min;MIN Shuai-bo;CHEN Kai(School of Precision Instruments and Optoelectronics Engineering,Tianjin University,Tianjin 300072,China;National Institute of Metrology,Beijing 100029,China;Zhejiang Sci-Tech University,Nanometer Measurement Lab,Hangzhou,Zhejiang 310018,China)

机构地区：[1]天津大学精密仪器与光电子工程学院,天津300072 [2]中国计量科学研究院,北京100029 [3]浙江理工大学纳米测量重点实验室,浙江杭州310018

出　　处：《计量学报》2021年第1期1-8,共8页Acta Metrologica Sinica

基　　金：国家自然科学基金(51675497);北京市自然科学基金(3162034);国家重点研发计划专项(2017YFF0206305).

摘　　要：迈克尔逊干涉术测量微位移可实现纳米甚至更高的分辨力,并且具备能直接溯源至激光波长等诸多优点,是目前微位移测量的重要技术手段。以限制迈克尔逊干涉仪品质提高的非线性误差为主要切入点,对目前各种基于迈克尔逊干涉原理的激光干涉技术进行了分类介绍,主要讨论了微位移测量中实现高精度和高分辨率的干涉测量技术,最后展望了激光干涉法测量微位移的近期发展趋势。Michelson interferometry can achieve nanometer or even higher resolution,and can be directly traced to laser wavelength and many other advantages. It is an important technical measure of micro displacement measurement at present. Aiming at various laser interferometric techniques based on Michelson interferometer principle are classified and introduced. The interferometric measurement techniques to achieve sub-nanometer accuracy and resolution in microdisplacement measurement are mainly discussed. Finally,the development trend of laser micro displacement measurement is prosected in future.

关 键 词：计量学 微位移测量 迈克尔逊激光干涉仪 激光干涉技术 干涉仪非线性 

分 类 号：TB921[一般工业技术—计量学]