基于双SAW谐振器的温度传感器设计  

Design of Temperature Sensor Based on Double SAW Resonator

作　　者：岳虎虎 彭斌[1] 李凌[1] 王博文 张万里[1] YUE Huhu;PENG Bin;LI Ling;WANG Bowen;ZHANG Wanli(State Key Laboratory of Electronic Thin Films and Integrated Devices, University of Electronic Science and Technology of China, Chengdu 610054, China)

机构地区：[1]电子科技大学电子薄膜与集成器件国家重点实验室,四川成都610054

出　　处：《压电与声光》2021年第1期1-4,共4页Piezoelectrics & Acoustooptics

摘　　要：为解决声表面波(SAW)谐振器的频率温度特性呈非线性的问题,该文提出了一种利用两个SAW谐振器来设计具有线性输出的SAW温度传感器的方法。根据该方法设计了两个基于硅酸镓镧压电基片的SAW温度传感器,每个传感器由两个不同的SAW谐振器串联而成。实验结果表明,两个SAW传感器在室温~300℃的宽温度范围内均表现出很好的线性度。这种简单有效的设计方法具有实现宽温度范围测试的能力,可推广到其他具有较大二阶温度系数的SAW温度传感器的研发中。In order to solve the problem that the frequency and temperature characteristics of SAW resonators are nonlinear,this paper proposes a method to design a SAW temperature sensor with linear output by using two SAW resonators.Two SAW temperature sensors based on lanthanum gallium silicate piezoelectric substrates are designed in this paper.Each sensor is composed of two different SAW resonators in series.The experimental results show that the two SAW sensors show good linearity in a wide temperature range from room temperature to 300℃.This simple and effective design method has the ability to achieve a wide temperature range test,and can be extended to the development of other SAW temperature sensors with larger second-order temperature coefficients.

关 键 词：声表面波 温度传感器 频率温度系数 线性输出 谐振器 

分 类 号：TN65[电子电信—电路与系统] TN384[电子电信—物理电子学]