高频声光偏转器的抗静电研究  

Study on Antistatic of High Frequency Acousto-optic Deflector

作　　者：夏茜[1] 陈清华 张泽红[1] 汤旭东[1] XIA Qian;CHEN Qinghua;ZHANG Zehong;TANG Xudong(The 26th Institute of China Electronics Technology Group Corporation, Chongqing 400060,China;Military Representative Office of Equipment Development Department of the Central Military Commission in Chongqing, Chongqing 400060, China)

机构地区：[1]中国电子科技集团公司第二十六研究所,重庆400060 [2]中央军委装备发展部军事代表局驻重庆地区军事代表室,重庆400060

出　　处：《压电与声光》2021年第1期51-53,58,共4页Piezoelectrics & Acoustooptics

摘　　要：该文介绍了一种具有抗静电设计的高频声光偏转器。该高频声光偏转器随着工作频率的提高,其使用的换能器厚度越来越薄,击穿电压越来越低,因此,在运输和使用过程中易受到静电损伤。该文通过在器件内设计防止换能器积累电荷的静电放电回路,解决了高频声光器件超薄换能器被静电损伤的问题,消除了静电放电问题的发生。结果表明,制作的高频声光偏转器样品通过了8000 V的静电实验,取得了良好的效果。A high frequency and antistatic acousto-optic deflector with antistatic design is introduced in this paper.As the working frequency of the high frequency acousto-optic deflector increases,the thickness of the transducer becomes thinner and thinner,the breakdown voltage becomes lower and lower,so it is easy to suffer from the electrostatic damage during the transportation and use.In this work,an electrostatic discharge circuit is used to prevent the transducer from accumulating charge in the device,thus the problem that the ultra-thin transducer of the high frequency acousto-optic device is damaged by the electrostatic has been solved,and the occurrence of electrostatic discharge is eliminated.The results show that the fabricated high frequency acousto-optic deflector sample passed the electrostatic experiment of 8000 V and achieved good results.

关 键 词：抗静电 声光偏转器 换能器 

分 类 号：TN384[电子电信—物理电子学]