卷曲量子阱红外探测器应力变化及对探测性能的影响  

Stress evolution and its effects on the detection performance of selfrolled quantum well infrared detector

作　　者：张飞 黄高山[2] 聂晓飞 甄红楼[4] 梅永丰[2] 范润华 ZHANG Fei;HUANG Gao-Shan;NIE Xiao-Fei;ZHEN Hong-Lou;MEI Yong-Feng;FAN Run-Hua(College of Ocean Science and Engineering,Shanghai Maritime University,Shanghai 201306,China;Department of Materials Science,State Key Laboratory of ASIC and Systems,Fudan University,Shanghai 200433,,China;Shanghai Engineering Technology Research Centre of Deep Offshore Material,Shanghai Maritime University,Shanghai 201306,China;State Key Laboratory of Infrared Physics,Shanghai Institute of Technical Physics,Chinese Academy of Sciences,Shanghai 200083,China)

机构地区：[1]上海海事大学海洋科学与工程学院,上海201306 [2]复旦大学材料科学系,上海200433 [3]上海海事大学上海深远海洋装备材料工程技术研究中心,上海201306 [4]中国科学院上海技术物理研究所红外物理国家重点实验室,上海200083

出　　处：《红外与毫米波学报》2021年第1期19-24,共6页Journal of Infrared and Millimeter Waves

基　　金：国家自然科学基金(61805042,61975035,U1632115);上海市基金(20ZR1423400,18ZR1405100,17JC1401700,19XD1400600)。

摘　　要：研究了卷曲量子阱红外探测器的应力状态变化及对光电性能的影响,发现拉应力使导带能级上移,压应力则使其下移,且双量子阱结构的卷曲薄膜的能带移动取决于两个量子阱的合应力变化;卷管薄膜可以有效将应力变化转变为应变,从而减小环境温度变化对能带移动的影响,提高红外器件温度稳定性;褶皱薄膜相比于卷管薄膜的量子阱具有较大的压应力,导致其光响应率较低;相同外加偏压下,卷管器件比褶皱器件的电压响应率提高约2.5倍。In this study,we investigate the stress evolution and its effects on the detection performance of self-rolled quantum well infrared detector.It is found that tensile stress can move the energy level of conduction band up,while compressive stress moves it down.The band movement of self-rolled film with double quantum wells depends on the change of resultant stresses in the two quantum wells.The rolled-up sample can effectively transform the stress change into strain,so as to weaken the impact of ambient temperature and enhance the stability of infrared devices.The wrinkled film has higher compressive stress compared with the rolled-up sample,which results in lower responsivity.When the same bias voltage is applied,the voltage responsivity of the rolled-up sample is about 2.5 times higher than that of the wrinkled sample.

关 键 词：量子阱红外探测器 卷曲薄膜 光致发光谱 应力 响应率 

分 类 号：TN21[电子电信—物理电子学]