微型晶体谐振器真空烤箱出料门系统设计及开发  

Design and Development of Discharge Door System of Vacuum Oven for Micro⁃crystal Resonator

作　　者：李玉梅 李刚炎[2] 辜志强[2] 岳思齐 LI Yumei;LI Gangyan;GU Zhiqiang;YUE Siqi(School of Mechanical Engineering,Hubei Engineering University,Xiaogan Hubei 432000,China;School of Mechanical and Electronic Engineering,Wuhan University of Technology,Wuhan Hubei 430070,China)

机构地区：[1]湖北工程学院机械工程学院,湖北孝感432000 [2]武汉理工大学机电工程学院,湖北武汉430070

出　　处：《机床与液压》2021年第4期112-115,共4页Machine Tool & Hydraulics

基　　金：湖北省教育厅科研计划重点项目(D20182703)。

摘　　要：为了满足微型晶体谐振器高性能封装需求,综合应用机-电-气一体化设计理念,研发一套微型晶体谐振器真空烤箱出料门系统。以密封性好、可靠性高为目标,提出了由Z轴按压机构、Y轴提升机构和防掉落保护机构组成的系统结构技术方案;以冲击性小、能耗低为目标,对气动回路进行详细设计,并在回路数学模型、仿真分析基础上,确定气动回路的关键参数;针对系统运动不同步现象,对其运动同步性进行仿真分析,验证气动回路设计合理性。最后样机试验表明系统运行稳定,完全满足系统预期功能需求及关键性能指标。In order to satisfy high performance packaging requirement of micro-crystal resonator,a discharge door system of vacuum oven for micro-crystal resonator was developed based on the mechanical-electrical-pneumatic integration design concept.For good sealing and high reliability,the technical scheme of the system structure was put forward,which was composed of a pressing mechanism on Z-axis direction,a lifting mechanism on Y-axis direction and anti-drop protection mechanism.For low impact and low energy consumption,the pneumatic circuit was designed in detail,and its key parameters were determined based on the mathematical model and simulation analysis of the circuit.Aiming at motion asynchronism of the system,the motion synchronization was simulated and analyzed to verify the pneumatic circuit’s rationality.Finally,the prototype test result shows that the system runs stably and fully meets its expected functional requirements and key performance indicators.

关 键 词：微型晶体谐振器 出料门系统 运动同步性 

分 类 号：TD774[矿业工程—矿井通风与安全]