基于激光三角法的内径测量不确定度分析  

An Uncertainty Analysis of Inner Diameter Measurement Based on Laser Displacement Triangulation

作　　者：杜华娜 杨铁牛 胡金洲 林浩良 DU Hua-na;YANG Tie-niu;HU Jin-zhou;LIN Hao-liang(Faculty of Intelligent Manufacturing,Wuyi University,Jiangmen 529020,China)

机构地区：[1]五邑大学智能制造学部,广东江门529020

出　　处：《五邑大学学报（自然科学版）》2021年第1期42-48,共7页Journal of Wuyi University(Natural Science Edition)

基　　金：国家科技重大专项资助项目(2011ZX02403-004)。

摘　　要：为探究激光三角法测量内径时的准确性,以30 mm的内孔零件为试验样本,通过控制测量装置移动,建立其与传感器示值的映射关系模型.分析激光三角法测量内径时影响精度的因素来源,并对其进行不确定度评定.结果表明:在物面倾角小于10o时,基于激光三角法进行内表面测量的不确定度为0.009 mm,其扩展不确定度为0.018 mm.实际测量验证了激光三角法测量内径的可行性,拓宽了激光三角法在曲面测量的应用.In order to explore the accuracy of the laser triangulation method in inner diameter measurement,a mapping relationship model between the inner hole parts with 30 mm as test samples and the indication value of the sensor was established by controlling the movement of the measuring device;the factors influencing the accuracy of the laser triangulation method in the inner diameter measurement were analyzed,and the uncertainty was evaluated.The results show that the uncertainty of inner surface measurement based on laser triangulation method is 0.009 mm and its expanded uncertainty is 0.018 mm when the inclination angle of object surface is less than 10o.The feasibility of laser triangulation method in measuring inner diameter is verified,and the application of laser triangulation in surface measurement is widened.

关 键 词：激光位移传感器 激光三角法 内径测量 不确定度分析 

分 类 号：TH711[机械工程—测试计量技术及仪器]