紧凑型微波ECR等离子体源的设计及其特性研究  

Design and Characteristic Study on Compact Microwave ECR Plasma Source

作　　者：柴昊[1] 贾军伟[1] 王斌[2] 李鹏 崔爽 冯旭 李伟 刘展[1] 李绍飞[1] 陈权[1] CHAI Hao;JIA Jun-wei;WANG Bin;LI Peng;CUI Shuang;FENG Xu;LI Wei;LIU Zhan;LI Shao-fei;CHEN Quan(Beijing Orient Institute of Measurement and Test,Beijing 100094,China;Beijing Institute of Space Mechanical and Electricity,Beijing 100076,China;Beijing Institute of Spacecraft System Engineering,Beijing 100094,China)

机构地区：[1]北京东方计量测试研究所,北京100094 [2]北京空间机电研究所,北京100076 [3]北京空间飞行器总体设计部,北京100094

出　　处：《真空》2021年第1期6-9,共4页Vacuum

摘　　要：地面电推进试验、星载Langmuir探针地面标定等航天任务,均对等离子体参数的校准提出了需求。目前,等离子体参数的校准主要是在稳定的等离子体环境中,通过被测仪器与标准进行量值比对的方式实现,因此,获得稳定的等离子体环境是开展校准技术研究的重要前提。微波ECR源产生的等离子体具有均匀、稳定、可调节范围宽等特点,十分适合应用于等离子体校准中。本文设计研制了永磁型微波ECR等离子体源,并对该源的特性进行了实验研究,获得了该源的空间分布特性、稳定性实验结果。实验结果表明:研制的紧凑型微波ECR源稳定性、重复性均在10%以内,具有作为标准源应用于等离子体校准的潜力。Space missions such as electrical propulsion experiment and Langmuir probe payload calibration demand the plasma parameter calibration in order to ensure the accuracy of the measurement results. At present,the calibration of plasma parameters is mainly achieved in a stable plasma environment through comparison of the instrument and the standard. Therefore, obtaining a stable plasma environment is a fundamental requirement for the study of plasma calibration. The microwave ECR source has the characteristics of uniformity, stability and wide adjustable range, which is quite suitable to apply in the plasma calibration. In this paper, a compact permanent magnetic microwave ECR plasma source was designed and studied, and its spatial distribution and stability were obtained. The experimental results show that the stability and repeatability of the microwave ECR source used in this experiment could achieve less than 10%, which has potential to be applied as the standard plasma source for the plasma parameter calibration.

关 键 词：微波ECR源 等离子体校准 空间分布 稳定性 

分 类 号：TB79[一般工业技术—真空技术]