FR-4覆铜板飞秒激光微孔加工工艺研究  

Techniques for Femtosecond Laser Processing of Micro-Holes in FR-4 Copper Clad Laminate

作　　者：郭敏超 王明娣[1] 张胜江 林瑶 王欣玥 尹梓航 王贤宝 Guo Minchao;Wang Mingdi;Zhang Shengjiang;Lin Yao;Wang Xinyue;Yin Zihang(Wang Xianbao School of Mechanical and Electrical Engineering Soochow University Suzhou,Jiangsu 215021,China)

机构地区：[1]苏州大学机电工程学院,江苏苏州215021

出　　处：《中国激光》2020年第12期127-135,共9页Chinese Journal of Lasers

基　　金：国家自然科学基金(51675360);苏州市重点产业技术创新-重点研发产业化项目(SGC201924);苏州市科技计划项目(SYG201805)。

摘　　要：针对FR-4覆铜板高精度微孔成形中传统机械打孔流程繁琐、精密化程度低等问题,采用飞秒激光对覆铜板进行单因素试验和正交试验,以入口直径、出口直径和锥度作为评判指标,探讨工艺参数对微孔质量的影响规律。结果表明,对微孔质量影响最大的因素为单脉冲能量,影响最小的因素为重复频率,最优工艺参数组合为:单脉冲能量29μJ,重复频率92 kHz,脉冲个数2112,离焦量0.01 mm。采用优化的工艺参数组后,可以对FR-4覆铜板进行高质量和高精度的打孔,实现快速、高效地制作印刷电路板。As for the high-precision micro-hole formation in FR-4 copper clad laminate, the traditional mechanical drilling process is cumbersome and the degree of precision is low. The femtosecond laser is used to perform the single factor test and the orthogonal test on the copper clad laminate. The inlet diameter, outlet diameter and taper are used as the evaluation indexes to discuss the influence of the process parameters on the quality of micro-holes. The results show that the single pulse energy has the greatest impact on the quality of micro-holes and the repetition rate has the least influence. The optimal process parameter combination is set as single pulse energy of 29 μJ, repetition rate of 92 kHz, pulse number of 2112, and defocusing amount of 0.01 mm. After these optimal process parameters are adopted, high-quality and high-precision drilling of FR-4 copper clad laminate can be performed to realize the rapid and efficient production of printed circuit boards.

关 键 词：激光技术 飞秒激光 FR-4覆铜板 打孔 微孔质量 

分 类 号：TN249[电子电信—物理电子学] V261.8[航空宇航科学与技术—航空宇航制造工程]