共面介质阻挡放电等离子体平板光源设计与研究  

Designof Flat-Panel Lamp Generated by Coplanar Dielectric Barrier Discharge Plasma

作　　者：王坤[1,2] 王世庆 李建[1,2] 陈伦江[1] Wang Kun;Wang Shiqing;Li Jian;Chen Lunjiang(Southwestern Institute of Physics,Chengdu 610041,China;Neijiang Normal University,Neijiang 641100,China)

机构地区：[1]核工业西南物理研究院,成都610041 [2]内江师范学院,内江641100

出　　处：《真空科学与技术学报》2020年第12期1119-1123,共5页Chinese Journal of Vacuum Science and Technology

基　　金：国家自然科学基金青年基金项目(11805058);内江师范学院校级重点项目(2020ZD010)。

摘　　要：采用阳极氧化铝作为介质层,设计制作了共面介质阻挡放电等离子体平板光源,研究了高温烘焙、电源频率和气体压强等对光源着火电压和发光效率的影响。结果表明,高温烘焙电极装置和高脉冲电源频率可以使共面介质阻挡放电光源放电更稳定,放电着火电压更低;当电极宽度为0.5 mm、间距为4.5 mm、介质层厚度约为20μm、气体压强为20 Torr时,共面介质阻挡放电等离子体光源的放电稳定,亮度为7200 cd/m^(2),白光发光效率为4.92 lm/W。A novel type of flat-panel lamp,energized by coplanar dielectric barrier discharge(DBD)plasma source with a dielectric anodic-alumina plate,was developed.The influence of the fabrication conditions,including the baking temperature,pulse frequency,gas-pressure,on the ignition voltage and luminous efficiency were studied for the design optimization.The results show that the high temperature baking and high frequency pulse had a major impact.Specifically,as the baking temperature and pulse frequency increased,the stability improved,and the ignition voltage decreased.The prototyped flat panel lamp,with an electrode width of 0.5 mm,a spacing of 4.5 mm,a dielectric layer thickness of 20μm and operating at 20 Torr,was experimentally evaluated.The self-developed flat-panel coplanar DBD plasma lamp was found to work fairly stable with a luminance of about 7200 cd/m^(2) and a white-light flux efficacy of 4.92 lm/W.

关 键 词：介质阻挡放电 共面介质阻挡放电 等离子体平板光源 阳极氧化铝 

分 类 号：O432[机械工程—光学工程]